Patents by Inventor Gama Trigagema

Gama Trigagema has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD FOR DEPOSITING OXIDE FILM BY PEALD USING NITROGEN
    Publication number: 20200111669
    Abstract: A method of depositing an oxide film on a template for patterning in semiconductor fabrication, includes: (i) providing a template having patterned structures thereon in a reaction space; and (ii) depositing an oxide film on the template by plasma-enhanced atomic layer deposition (PEALD) using nitrogen gas as a carrier gas and also as a dilution gas, thereby entirely covering with the oxide film an exposed top surface of the template and the patterned structures.
    Type: Application
    Filed: October 4, 2018
    Publication date: April 9, 2020
    Inventors: Masaru Zaitsu, Atsuki Fukazawa, Gama Trigagema