Patents by Inventor Gareth Guest

Gareth Guest has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma vacuum pumping cell
    Patent number: 6422825
    Abstract: A plasma pumping cell and method for pumping ions from a first region containing a plasma to a second region when the plasma pumping cell is interposed between the first and second regions, the plasma pumping cell including: a partition member (4) positioned between the first and second regions, the partition member (4) having a through opening defining a conduit (22); a plurality of magnets (24) positioned relative to the conduit in a manner to provide lines of magnetic force that extend through the conduit; a source of free electrons in communication with the conduit; and an electric potential source (34) disposed relative to the conduit to create an electrostatic field which accelerates ions from the conduit (22) to the second region.
    Type: Grant
    Filed: December 28, 2000
    Date of Patent: July 23, 2002
    Assignee: Tokyo Electron Limited
    Inventors: Raphael A. Dandl, Wayne L. Johnson, Gareth Guest
  • Plasma vacuum pumping cell
    Publication number: 20010016166
    Abstract: A plasma pumping cell and method for pumping ions from a first region containing a plasma to a second region when the plasma pumping cell is interposed between the first and second regions, the plasma pumping cell including: a partition member (4) positioned between the first and second regions, the partition member (4) having a through opening defining a conduit (22); a plurality of magnets (24) positioned relative to the conduit in a manner to provide lines of magnetic force that extend through the conduit; a source of free electrons in communication with the conduit; and an electric potential source (34) disposed relative to the conduit to create an electrostatic field which accelerates ions from the conduit (22) to the second region.
    Type: Application
    Filed: December 28, 2000
    Publication date: August 23, 2001
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Raphael A. Dandl, Wayne L. Johnson, Gareth Guest