Patents by Inventor Garry Allen Rose

Garry Allen Rose has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Spectral purity filters (SPF), support structures for SPF films and corresponding methods of manufacture
    Patent number: 9891356
    Abstract: A device includes spectral purity filters (SPF) and structures for supporting SPF films. The device further includes a monolithic support having a mesh portion and a frame portion and a film overlaying at least a portion of the support. In some cases, the film can be affixed to the support without an adhesive. The monolithic support can be Silicon, stainless steel or some other suitable material and the film can be a single layer spectral purity filter film or a multilayer spectral purity filter film. The mesh portion of the support can include a plurality of through-holes that are formed by etching and/or eroding a thinned material such as silicon or stainless steel.
    Type: Grant
    Filed: September 8, 2015
    Date of Patent: February 13, 2018
    Assignee: KLA-Tencor Corporation
    Inventors: Joseph Walsh, Frank Barkusky, Eduardo Soto, Sarbjit Singh Grewal, Orlando Threet, Gildardo Rios Delgado, Garry Allen Rose