Abstract: A fuel cell system includes F fuel cell stacks, where F is an integer greater than or equal to one. A coolant system includes liquid coolant in fluid communication with the F fuel cell stacks. A waste heat recovery system includes a turbine, a generator rotated by the turbine, a condenser in fluid communication with an outlet of the turbine, a pump fluidly coupled to an outlet of the condenser, and a heat exchanger in fluid communication with the coolant system, an inlet of the turbine and an outlet of the pump and configured to exchange heat between the liquid coolant and a working fluid to expand the working fluid supplied to the inlet of the turbine.

Abstract: A contamination mitigation or surface modification system for ion implantation processes includes a gas source, a controller, a valve, and a process chamber. The gas source provides delivery of a gas, be it atmospheric or reactive, to the valve and is controlled by the controller. The valve is located on or about the process chamber and controllably adjusts flow rate and/or composition of the gas to the process chamber. The process chamber holds a target device, such as a target wafer and permits interaction of the gas with an ion beam to mitigate contamination of the target wafer and/or to modify the existing properties of the processing environment or target device to change a physical or chemical state or characteristic thereof. The controller selects and adjusts composition of the gas and flow rate according to contaminants present within the ion beam, or lack thereof, as well total or partial pressure analysis.