Patents by Inventor Gary Dabbaugh

Gary Dabbaugh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Hydrogenated silicon carbide as a liner for self-aligning contact vias
    Patent number: 6362094
    Abstract: The present invention provides a method of fabricating a self-aligning contact opening comprising: (a) forming a dielectric layer over a semiconductor substrate and gate electrodes located on the semiconductor substrate, (b) forming a carbide liner over the dielectric layer, and (c) etching at least a portion the carbide liner to form a self-aligning contact opening between the gate electrodes.
    Type: Grant
    Filed: August 16, 2000
    Date of Patent: March 26, 2002
    Assignee: Agere Systems Guardian Corp.
    Inventors: Gary Dabbaugh, Gerald W. Gibson, Jr., Troy A. Giniecki, Kurt G. Steiner