Abstract: Methods and systems permit fabricating structures using liquid sources without active temperature control. A substrate is disposed within a substrate processing chamber. A liquid source of a group-III precursor is provided in a bubbler. A push gas is applied to the liquid source to drive the group-III precursor into a vaporizer. A carrier gas is flowed into the vaporizer. A flow of vaporized group-III precursor carried by the carrier gas is injected from the vaporizer into the processing chamber. A nitrogen precursor is flowed into the processing chamber. A group-III nitride layer is deposited over the substrate with a thermal chemical vapor deposition within the processing chamber using the vaporized group-III precursor and the nitrogen precursor.

Abstract: Novel compositions of matter comprise the reaction products of one molar proportion of poly(oxyalkylene)amines with from about 0.5 to about 2.0 molar proportion of epihalohydrins at a temperature from about 40.degree. C. to about 150.degree. C. in the presence of an inorganic base.

Abstract: Novel compositions comprise the polymeric reaction products of primary alkoxyalkylamines with epihalohydrins at temperatures in the range from about 40.degree. C. to about 150.degree. C. in the presence of an inorganic base. Such reaction products may be used as sedimentation and degradation inhibitors in hydrocarbon oils, antifoulants, carburetor detergents, lubricant additives, and corrosion inhibitors.