Patents by Inventor Gary Lee Evans

Gary Lee Evans has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Systems and methods for epitaxial processing of a semiconductor substrate
    Patent number: 6436796
    Abstract: A thermal processing system and method for processing a semiconductor substrate. An inductor couples energy to a susceptor, wherein the spacing between the inductor and the susceptor is configured for the steady-state portions of a CVD epitaxial deposition process. The temperature uniformity of the susceptor is improved during the transient portions of the process, the heat ramp-up and cool down, by varying the distance of separation between the inductor and the susceptor. Temperature non-uniformities are a common cause of slip. Additional aspects of the invention provide for improved thermal shielding of the edges and top surface of the susceptor. Thicker susceptors also improve temperature uniformity.
    Type: Grant
    Filed: January 31, 2000
    Date of Patent: August 20, 2002
    Assignee: Mattson Technology, Inc.
    Inventors: Robert D. Mailho, Mark J. O'Hara, Glenn A. Pfefferkorn, Gary Lee Evans, Kristian E. Johnsgard