Patents by Inventor Gary Mark Gunderson

Gary Mark Gunderson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Inspection device with vertically moveable assembly
    Patent number: 9535089
    Abstract: The inspection of semiconductors or like substrates by the present mechanism minimizes deflection in the checkplate and probe card. An inspection device including a housing, a toggle assembly within the housing, an objective lens assembly attached within the toggle assembly including an objective coupled within an objective focus, wherein the objective focus is deflectable along an optics axis, and a cam assembly including a rotary cam and a window carrier, wherein the window carrier is moveable along the optics axis with rotation of the rotary cam, wherein the cam assembly is coupled to the toggle assembly with the objective and window are aligned along the optics axis.
    Type: Grant
    Filed: May 20, 2014
    Date of Patent: January 3, 2017
    Assignee: Rudolph Technologies, Inc.
    Inventors: Gary Mark Gunderson, Greg Olmstead
  • INSPECTION DEVICE WITH VERTICALLY MOVEABLE ASSEMBLY
    Publication number: 20140253166
    Abstract: The inspection of semiconductors or like substrates by the present mechanism minimizes deflection in the checkplate and probe card. An inspection device including a housing, a toggle assembly within the housing, an objective lens assembly attached within the toggle assembly including an objective coupled within an objective focus, wherein the objective focus is deflectable along an optics axis, and a cam assembly including a rotary cam and a window carrier, wherein the window carrier is moveable along the optics axis with rotation of the rotary cam, wherein the cam assembly is coupled to the toggle assembly with the objective and window are aligned along the optics axis.
    Type: Application
    Filed: May 20, 2014
    Publication date: September 11, 2014
    Applicant: RUDOLPH TECHNOLOGIES, INC.
    Inventors: Gary Mark Gunderson, Greg Olmstead
  • Inspection device with vertically moveable assembly
    Patent number: 8729917
    Abstract: The inspection of semiconductors or like substrates by the present mechanism minimizes deflection in the checkplate and probe card. An inspection device including a housing, a toggle assembly within the housing, an objective lens assembly attached within the toggle assembly including an objective coupled within an objective focus, wherein the objective focus is deflectable along an optics axis, and a cam assembly including a rotary cam and a window carrier, wherein the window carrier is moveable along the optics axis with rotation of the rotary cam, wherein the cam assembly is coupled to the toggle assembly with the objective and window are aligned along the optics axis.
    Type: Grant
    Filed: April 25, 2011
    Date of Patent: May 20, 2014
    Assignee: Rudolph Technologies, Inc.
    Inventors: Gary Mark Gunderson, Greg Olmstead
  • INSPECTION DEVICE WITH VERTICALLY MOVEABLE ASSEMBLY
    Publication number: 20120098563
    Abstract: The inspection of semiconductors or like substrates by the present mechanism minimizes deflection in the checkplate and probe card. An inspection device including a housing, a toggle assembly within the housing, an objective lens assembly attached within the toggle assembly including an objective coupled within an objective focus, wherein the objective focus is deflectable along an optics axis, and a cam assembly including a rotary cam and a window carrier, wherein the window carrier is moveable along the optics axis with rotation of the rotary cam, wherein the cam assembly is coupled to the toggle assembly with the objective and window are aligned along the optics axis.
    Type: Application
    Filed: April 25, 2011
    Publication date: April 26, 2012
    Applicant: RUDOLPH TECHNOLOGIES, INC.
    Inventors: Gary Mark Gunderson, Greg Olmstead