Patents by Inventor Gary P. Rathmell

Gary P. Rathmell has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Gas delivery systems for particle beam processing
    Patent number: 5851413
    Abstract: Apparatus and method of an improved gas delivery system for delivering reactant material to a workpiece, such as a substrate, being operated on by a particle beam employs a shroud-type concentrator having an interior axial passage. Fluid reactant material is supplied to the axial passage for delivery to the workpiece. A particle beam can traverse the axial passage for impingement on the workpiece surface, concurrently if desired with the reactant delivery.
    Type: Grant
    Filed: June 19, 1996
    Date of Patent: December 22, 1998
    Assignee: Micrion Corporation
    Inventors: Robert A. Casella, Charles J. Libby, Gary P. Rathmell