Patents by Inventor Gary R. Ahr

Gary R. Ahr has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process endpoint detection in processing chambers
    Patent number: 6878214
    Abstract: Method and apparatus for determining an endpoint of a cleaning process running in a chamber. In particular, one embodiment of the present invention is a method that includes steps of: (a) directing radiation absorbed by a byproduct of the cleaning process into an exhaust line of the chamber; (b) detecting a measure of absorbance of the radiation by the byproduct; and (c) determining the endpoint when the measure of absorbance falls within a predetermined window.
    Type: Grant
    Filed: January 24, 2002
    Date of Patent: April 12, 2005
    Assignee: Applied Materials, Inc.
    Inventors: Laxman Murugesh, Gary R. Ahr
  • Process endpoint detection in processing chambers
    Publication number: 20030136425
    Abstract: Method and apparatus for determining an endpoint of a cleaning process running in a chamber. In particular, one embodiment of the present invention is a method that includes steps of: (a) directing radiation absorbed by a byproduct of the cleaning process into an exhaust line of the chamber; (b) detecting a measure of absorbance of the radiation by the byproduct; and (c) determining the endpoint when the measure of absorbance falls within a predetermined window.
    Type: Application
    Filed: January 24, 2002
    Publication date: July 24, 2003
    Applicant: Applied Materials, Inc.
    Inventors: Laxman Murugesh, Gary R. Ahr