Abstract: The accuracy of an impedance tuner may be improved and the size may be reduced by using linear actuators instead of rotary motors. The linear actuator may be integrated with position sensors to allow very small size, and implemented with a servo system for best accuracy and speed. Spring loaded arms holding the mismatch probes allow the tuner to operate in any orientation to further fit into small spaces. The small size reduces losses by allowing direct connection to wafer probes for on-wafer measurement systems.

Abstract: The accuracy of an impedance tuner may be improved and the size may be reduced by using linear actuators instead of rotary motors. The linear actuator may be integrated with position sensors to allow very small size, and implemented with a servo system for best accuracy and speed. Spring loaded arms holding the mismatch probes allow the tuner to operate in any orientation to further fit into small spaces. The small size reduces losses by allowing direct connection to wafer probes for on-wafer measurement systems.

Abstract: A load pull system for making measurements on a DUT at millimeter wave frequencies using active tuning. The system uses phase and amplitude control of each signal at low frequency before being upconverted to the millimeter wave measurement frequencies. The measured signals at the DUT plane may be down-converted for measurement with a low frequency analyzer.

Abstract: A tuner system for conducting measurements on a Device Under Test (DUT) includes at least one passive tuner, and calibration data for the at least one passive tuner including a set of s-parameters at a set of calibration frequencies. A measurement on the DUT is done at a measurement frequency at which the at least one passive tuner is not calibrated. The tuner s-parameters at the measurement frequency are determined by interpolation between or extrapolation from the s-parameters at calibration frequencies.

Abstract: A load pull system and method for calibrating the system and conducting measurements on a Device Under Test (DUT). The system includes at least one passive tuner; and a modulated signal connected to the DUT input. The passive tuner is calibrated at multiple frequencies within the modulation bandwidth of the modulated signal. The impedance and measured quantities such as power at the DUT reference plane are determined using tuner s-parameters at multiple frequencies within the modulation bandwidth.

Abstract: A load pull system for making measurements on a DUT at millimeter wave frequencies using active tuning. The system uses phase and amplitude control of each signal at low frequency before being upconverted to the millimeter wave measurement frequencies. The measured signals at the DUT plane may be down-converted for measurement with a low frequency analyzer.

Abstract: Systems and methods of measuring and determining noise parameters. An exemplary method measures noise data and determines element values of a device noise model for a device under test (DUT), using a test system including an impedance tuner coupled to an input of the DUT for presenting a controllable variable impedance to the DUT and a noise receiver coupled to an output of the DUT. Noise data is measured as a function of at least one measurement parameter. The measured data includes raw noise data read from the noise receiver, and is used to determine element values of the device noise model. The system may include a database of device models.

Abstract: A tuner system for conducting measurements on a Device Under Test (DUT) includes at least one passive tuner, and calibration data for the at least one passive tuner including a set of s-parameters at a set of calibration frequencies. A measurement on the DUT is done at a measurement frequency at which the at least one passive tuner is not calibrated. The tuner s-parameters at the measurement frequency are determined by interpolation between or extrapolation from the s-parameters at calibration frequencies.

Abstract: A load pull system and method for calibrating the system and conducting measurements on a Device Under Test (DUT). The system includes at least one passive tuner; and a modulated signal connected to the DUT input. The passive tuner is calibrated at multiple frequencies within the modulation bandwidth of the modulated signal. The impedance and measured quantities such as power at the DUT reference plane are determined using tuner s-parameters at multiple frequencies within the modulation bandwidth.

Abstract: A solid state impedance tuner or impedance tuner system including a housing structure and at least two solid state tuner modules electrically combined and disposed in one package within the housing structure. Each tuner module includes at least one solid state control element. Another embodiment is directed to an impedance tuner module card configured in a standardized system architecture. The card includes a chassis board, and at least one solid state tuner module integrated on the card and supported on or by the chassis board, each module including at least one solid state control element. Methods for calibrating a solid state impedance tuner that includes at least two solid state tuner modules combined in one package are disclosed.

Abstract: A solid state impedance tuner or impedance tuner system including a housing structure and at least two solid state tuner modules electrically combined and disposed in one package within the housing structure. Each tuner module includes at least one solid state control element. Another embodiment is directed to an impedance tuner module card configured in a standardized system architecture. The card includes a chassis board, and at least one solid state tuner module integrated on the card and supported on or by the chassis board, each module including at least one solid state control element. Methods for calibrating a solid state impedance tuner that includes at least two solid state tuner modules combined in one package are disclosed.

Abstract: A measurement system and method for conducting measurements on a device-under-test (DUT). The system includes, in one embodiment, a passive impedance controlling tuner, and a signal transmission line, the tuner including a signal transmission line segment as at least part of the signal transmission line. A signal coupling device is coupled in a non-contacting relationship to the signal transmission line between a signal port of the DUT and the tuner for sampling signals propagating between the passive impedance controlling tuner and the DUT to allow measurement of an actual impedance presented to the DUT with the DUT in place in the measurement system during measurement of DUT characteristics. Measurement system equipment receives response signals from the signal coupler. The measurement system is configured to conduct measurement of DUT characteristics without pre-characterizing the impedance controlling tuner.

Abstract: A mechanical impedance tuner has at least two probe carriages mounted for movement along an axis parallel to the center conductor. The at least two probe carriages including a first probe carriage and a second probe carriage. Each probe carriage has at least N probes where N is an integer equal to or greater than one, and at least one of the N probes is mechanically different or of different nominal geometry from the probes on at least one of the other carriages so that each such probe has an non-identical frequency response.

Abstract: A solid state impedance tuner or impedance tuner system includes a control element array with a plurality of solid state control elements configured to be turned on simultaneously to achieve a desired impedance state. The control element array comprises N solid state control elements arranged along an RF transmission line. A controller selectively turns on or off each control element by application of a control signal to vary an impedance presented by the control element array, Another aspect is an impedance tuner module card configured in a standardized system architecture, with a chassis board, and at least one solid state tuner module integrated on the card A chassis electrical connector connected to the tuner module is configured for connection to a corresponding backplane connector. Methods for calibrating a solid state impedance tuner that includes at least two solid state tuner modules combined in one package are disclosed.

Abstract: Methods are described for measuring data in a test setup including an impedance tuner. In an exemplary embodiment, the data is data for measuring noise parameters. The data is measured versus a sweep parameter for one tuner state at a time.

Abstract: An impedance tuner system, usable in a measurement system including at least one measurement system device, the tuner system comprising the impedance tuner having a signal transmission line, and an impedance-varying system coupled to the transmission line, and responsive to command signals to selectively vary the impedance presented by the impedance tuner. An impedance tuner controller is configured to generate the command signals, and wherein measurement device drivers and at least one of characterization, calibration and measurement algorithms are embedded into the tuner controller, the tuner controller configured to allow a user to control execution of said at least one of the characterization, calibration and measurement algorithms using the tuner controller.

Abstract: Systems and methods of measuring and determining noise parameters. An exemplary method measures noise data and determines element values of a device noise model for a device under test (DUT), using a test system including an impedance tuner coupled to an input of the DUT for presenting a controllable variable impedance to the DUT and a noise receiver coupled to an output of the DUT. Noise data is measured as a function of at least one measurement parameter. The measured data includes raw noise data read from the noise receiver, and is used to determine element values of the device noise model.

Abstract: An impedance tuner includes a controller, an RF transmission line, and a movable capacitive object configured for movement commanded by the controller relative to the transmission line to alter impedance. A position sensor is configured to provide feedback position data to the controller indicative of the actual position of the capacitive object after it is moved. The controller is configured to utilize the feedback position data in a closed loop to position the capacitive object at a desired position within a tolerance.

Abstract: An impedance tuner includes a controller, an RF transmission line, and a movable capacitive object configured for movement commanded by the controller relative to the transmission line to alter impedance. A position sensor is configured to provide feedback position data to the controller indicative of the actual position of the capacitive object after it is moved. The controller is configured to utilize the feedback position data in a closed loop to position the capacitive object at a desired position within a tolerance.

Abstract: An impedance tuner may include a transmission media for propagating RF signals, a reflection magnitude control device mounted in a fixed position relative to a direction of signal propagation along said transmission media, and a phase shifter to control a reflection phase. A multi-section probe for an impedance tuner system may include a plurality of probe sections and a holder structure for mechanically supporting the plurality of probe sections.