Patents by Inventor Gary Richard Doyle

Gary Richard Doyle has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Rotary signal coupling for chemical mechanical polishing endpoint detection with a westech tool
    Patent number: 5663637
    Abstract: Rotary signal coupling in in-situ monitoring of a chemical-mechanical polishing process. A sensor fixed to a rotatable wafer carrier for creating a signal responsive to the chemical mechanical polishing process is coupled to a bottom half of a rotary transformer fixed to a rotating portion of the polisher. A top half of the rotary transformer, coupled to the bottom half of the rotary transformer, is fixed to a stationary portion of the polisher. The signal from the sensor is thus coupled through the rotary transformer to a process monitor.
    Type: Grant
    Filed: March 19, 1996
    Date of Patent: September 2, 1997
    Assignee: International Business Machines Corporation
    Inventors: Leping Li, Steven George Barbee, Gary Richard Doyle, Arnold Halperin, Kevin L. Holland, Francis Walter Kazak, Robert B. Lipori, Anne Elizabeth McGuire, Rock Nadeau, William Joseph Surovic