Patents by Inventor Gary Urban Keppers

Gary Urban Keppers has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CASTABLE ALUMINUM ALLOYS FOR WAFER HANDLING CHAMBERS IN SEMICONDUCTOR PROCESSING SYSTEMS
    Publication number: 20230235428
    Abstract: A substrate handling chamber body is formed from a castable aluminum alloy including a manganese (Mn) constituent and an iron (Fe) constituent. The castable aluminum alloy has a manganese (Mn) constituent-to-iron (Fe) constituent ratio that between about 1.125 and about 1.525 to limit microporosity and shrinkage porosity within the castable aluminum alloy forming the substrate handling chamber body. Semiconductor processing systems and methods of making substrate handling chamber bodies for semiconductor processing systems are also described.
    Type: Application
    Filed: January 23, 2023
    Publication date: July 27, 2023
    Inventors: Joaquin Aguilar Santillan, Hong Gao, Shanker Kuttath, Shaofeng Chen, Gary Urban Keppers, Felix Rabinovich