Abstract: A system and method for warning of emergency vehicles includes a computing device that receives location data from a transmitter associated with a first vehicle based on a warning system of the first vehicle being activated. The computing device transmits vehicle notification data to a second vehicle based on the location data.

Abstract: A method of sampling semiconductor wafers includes passing a lot of semiconductor wafers into a semiconductor processing tool, processing a first portion of the lot in one process chamber of the semiconductor processing tool and a second portion of the lot in another process chamber of the semiconductor processing tool to produce processed semiconductor wafers, and initiating a wafer sampling engine to select at least one of the processed semiconductor wafers for sampling. The wafer sampling engine computes a long term process capability index for the processing tool and a short term process performance index for at least one of the processing tool and process chamber, identifies at least one desired sampling measurement type, selects the at least one of the processed semiconductor wafers for sampling, and collects the desired measurement types from the at least one of the processed semiconductor wafers selected for sampling.

Abstract: A system and method for warning of emergency vehicles includes a computing device that receives location data from a transmitter associated with a first vehicle based on a warning system of the first vehicle being activated. The computing device transmits vehicle notification data to a second vehicle based on the location data.

Abstract: A method includes passing a lot through a production process and evaluating a statistical quality of the production process. Additionally, the method includes calculating an advanced process control (APC) recipe parameter adjustment (RPA) distribution value and determining if sampling is indicated. Furthermore, the method includes, if sampling is indicated, performing a measurement process of the lot.

Abstract: A method of sampling semiconductor wafers includes passing a lot of semiconductor wafers into a semiconductor processing tool, processing a first portion of the lot in one process chamber of the semiconductor processing tool and a second portion of the lot in another process chamber of the semiconductor processing tool to produce processed semiconductor wafers, and initiating a wafer sampling engine to select at least one of the processed semiconductor wafers for sampling. The wafer sampling engine computes a long term process capability index for the processing tool and a short term process performance index for at least one of the processing tool and process chamber, identifies at least one desired sampling measurement type, selects the at least one of the processed semiconductor wafers for sampling, and collects the desired measurement types from the at least one of the processed semiconductor wafers selected for sampling.

Abstract: A method includes passing a lot through a production process and evaluating a statistical quality of the production process. Additionally, the method includes calculating an advanced process control (APC) recipe parameter adjustment (RPA) distribution value and determining if sampling is indicated. Furthermore, the method includes, if sampling is indicated, performing a measurement process of the lot.

Abstract: An apparatus and a method for enhancing a field of vision of a user with a visual impairment to help the user to navigate safely in the surroundings. The apparatus includes a body, at least one video device coupled to the body for recording a visual image of a physical environment surrounding the user, at least one monitor coupled to the body, a processor which receives signals from the at least one video device and operatively controls the at least one monitor to display the visual image recorded by the at least one video device, and a tunnel vision finder to determine the user's actual vision size. The method includes the step of determining the user's actual vision size, acquiring a visual image of a physical environment surrounding the user, processing the visual image, and displaying the visual image in the user's actual vision.

Abstract: An apparatus for providing information about a physical surrounding environment to a user includes an elongate body having first and second opposing ends and a mast, at least one sensor mountably coupled to the mast, at least one dual purpose, bi-directional haptic force feedback device including first and second haptic force feedback mechanisms and a vibrator, and a processor, which receives signals from the at least one sensor and operatively controls the at least one dual purpose, bi-directional haptic force feedback device.

Abstract: Integration of factory level advanced process control (FL-APC) system and tool level advanced process control (TL-APC) system using selectable APC operation modes indicating different operational settings for the FL-APC system and at least one TL-APC system is disclosed. During operation, the FL-APC system controls operation of the TL-APC system. The invention allows a manufacturing execution system (MES) to have additional capability to run the process control functions at FL-APC system and/or TL-APC system, and allows integration of a variety of different tools with a TL-APC system. An implementation method, system and program product are also disclosed.

Abstract: A method of performing measurement sampling in a production process includes passing a lot through a manufacturing process, employing a set of combinational logistics to determine if sampling is indicated and, if sampling is indicated, establishing a sampling decision. The method further requires querying a set of lot sampling rules to evaluate the sampling decision, evaluating a statistical quality of the process if no lot sampling rules exist, and automatically determining whether the lot passing through the production process requires sampling based on the combinational logistics, statistical quality and lot sampling rules.

Abstract: An apparatus for providing information about a three-dimensional environment to a user includes; a handle, at least one sensor operatively coupled to the handle, a tactile pad disposed on the handle, a plurality of tactile buttons arrayed on the tactile pad, a plurality of actuators, wherein each actuator is operatively coupled to one of the plurality of tactile buttons to control a height thereof in relation to the tactile pad, and a processor which receives signals from the at least one sensor and controls positioning of the plurality of actuators to represent a physical environment sensed by the at least one sensor.

Abstract: A method for monitoring water usage in a home or business through the use of pattern recognition. Wherein the system monitors water flow through a valve and monitors usage over a period of time to determine normal usage. Once a normal pattern of usage is determined the system monitors pattern usage over time and determines if the pattern of usage exceeds cutoffs. In the event the usage exceeds the cutoffs the system produces an alarm and shuts off the valve. Once the cause for the system cutoff has been determined the cause may be corrected and the valve reopened.

Abstract: An apparatus and a method for enhancing a field of vision of a user with a visual impairment to help the user to navigate safely in the surroundings. The apparatus includes a body, at least one video device coupled to the body for recording a visual image of a physical environment surrounding the user, at least one monitor coupled to the body, a processor which receives signals from the at least one video device and operatively controls the at least one monitor to display the visual image recorded by the at least one video device, and a tunnel vision finder to determine the user's actual vision size. The method includes the step of determining the user's actual vision size, acquiring a visual image of a physical environment surrounding the user, processing the visual image, and displaying the visual image in the user's actual vision.

Abstract: An apparatus for providing information about a physical surrounding environment to a user includes; a handle, at least one sensor operatively coupled to the handle, a plurality of dual purpose, bi-directional haptic force feedback devices coupled to the handle, and a processor which receives signals from the at least one sensor and controls force feedback of the plurality of dual purpose, bi-directional haptic force feedback devices to convey information about the physical surrounding environment sensed by the at least one sensor.

Abstract: A method includes passing a lot through a production process and evaluating a statistical quality of the production process. Additionally, the method includes calculating an advanced process control (APC) recipe parameter adjustment (RPA) distribution value and determining if sampling is indicated. Furthermore, the method includes, if sampling is indicated, performing a measurement process of the lot.

Abstract: A method of performing measurement sampling in a production process includes passing a lot through a manufacturing process, employing a set of combinational logistics to determine if sampling is indicated and, if sampling is indicated, establishing a sampling decision. The method further requires querying a set of lot sampling rules to evaluate the sampling decision, evaluating a statistical quality of the process if no lot sampling rules exist, and automatically determining whether the lot passing through the production process requires sampling based on the combinational logistics, statistical quality and lot sampling rules.

Abstract: A computer program product and system of providing a dynamic sampling plan for integrated metrology is disclosed. The computer program product may include a computer readable medium that includes a computer readable program, wherein the computer readable program when executed on a computer causes the computer to: model a sampling plan for use with a factory level advanced processing control (FL-APC) system; receive a request for a sampling plan; and send a recommended sampling plan, based upon the request and the modeling. The recommended sampling plan may be sent to an equipment interface (EI) and on to a tool for implementation in a manufacturing environment.

Abstract: Integration of factory level advanced process control (FL-APC) system and tool level advanced process control (TL-APC) system using selectable APC operation modes indicating different operational settings for the FL-APC system and at least one TL-APC system is disclosed. During operation, the FL-APC system controls operation of the TL-APC system. The invention allows a manufacturing execution system (MES) to have additional capability to run the process control functions at FL-APC system and/or TL-APC system, and allows integration of a variety of different tools with a TL-APC system. An implementation method, system and program product are also disclosed.

Abstract: A method and system for reducing the variation in film thickness on a plurality of semiconductor wafers having multiple deposition paths in a semiconductor manufacturing process is disclosed. A film of a varying input thickness is applied to semiconductor wafers moving through various film deposition paths. The deposition path of each of the semiconductor wafers is recorded. A subset of semiconductor wafers is measured and an average film input thickness corresponding to each of the film deposition paths is calculated. If semiconductor wafer in the specific film deposition path does not have measurement data, by default it uses historical measurement data. The average film input thickness of the deposition path corresponding to a given semiconductor wafer is then used to modify the recipe of a process tool, such as a Chemical Mechanical Planarization (CMP) Process Tool. An improved manufacturing process is achieved without the use of excess measurements.

Abstract: Integration of factory level advanced process control (FL-APC) system and tool level advanced process control (TL-APC) system using selectable APC operation modes indicating different operational settings for the FL-APC system and at least one TL-APC system is disclosed. During operation, the FL-APC system controls operation of the TL-APC system. The invention allows a manufacturing execution system (MES) to have additional capability to run the process control functions at FL-APC system and/or TL-APC system, and allows integration of a variety of different tools with a TL-APC system. An implementation method, system and program product are also disclosed.