Abstract: A piezoelectric tactile sensor is disposed on the end of a flexible silicon beam to sense contact of a beam by an object, such as a circuit chiplead, whose position is to be measured. A piezoelectric actuator is disposed on top of the beam, and a variablre DC voltage is supplied to the actuator to cause the beam to deflect into an object whose position is to be measured. Processing circuitry senses the signal generated by the sensor in response to contact with the object, and determines the position of the object from the magnitude of the actuator voltage at that point. To increase the magnitude of the signal generated by the sensor, an AC voltage is also supplied to the actuator to cause the beam to vibrate at a harmonic frequency. A plurality of the beams can be etched from a single wafer of silicon and utilized to simultaneously measure the positions of a plurality of circuit chipleads.