Patents by Inventor Gauri Nabar

Gauri Nabar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12293913
    Abstract: Described herein are IC devices include tight-pitched patterned metal layers, such as metal gratings, and processes for forming such patterned metal layers. The processes include subtractive metal patterning, where portions of a metal layer are etched and replaced with an insulator to form the metal grating. Masks for etching portions of the metal layer are generated using directed self-assembly (DSA). In some examples, multiple etching steps are performed, e.g., to generate metal lines at a first pitch, and to add additional lines at half of the first pitch. In some examples, additive metal patterning is performed in addition to subtractive metal patterning.
    Type: Grant
    Filed: December 22, 2021
    Date of Patent: May 6, 2025
    Assignee: Intel Corporation
    Inventors: Gurpreet Singh, Richard E. Schenker, Nityan Labros Nair, Nafees A. Kabir, Gauri Nabar, Eungnak Han, Xuanxuan Chen, Tayseer Mahdi, Brandon Jay Holybee, Charles Henry Wallace, Paul A. Nyhus, Manish Chandhok, Florian Gstrein