Abstract: A wafer level integration module and method for fabricating are disclosed according to a construction whereby semiconductor functional device fabrication is carried out only after interconnect structures are processed on a bare wafer. The fabrication and processing include forming interconnect structures in a first side of a wafer. An insulation layer is deposited on the first side of the wafer. A conductive layer is deposited on the insulation layer so as to fill the interconnect structures and contact the insulation layer on the walls thereof. The conductive layer on the interconnect structures forms interconnection contacts on the first side of the wafer and interconnection vias extending into the wafer. The conductive layer including the interconnection contacts is exposed on the first side of the wafer. A semiconductor functional device is fabricated on the first side of the wafer and interconnected with the interconnection contacts during the fabricating.

Abstract: A wafer level integration module and method for fabricating are disclosed according to a construction whereby semiconductor functional device fabrication is carried out only after interconnect structures are processed on a bare wafer. The fabrication and processing include forming interconnect structures in a first side of a wafer. An insulation layer is deposited on the first side of the wafer. A conductive layer is deposited on the insulation layer so as to fill the interconnect structures and contact the insulation layer on the walls thereof. The conductive layer on the interconnect structures forms interconnection contacts on the first side of the wafer and interconnection vias extending into the wafer. The conductive layer including the interconnection contacts is exposed on the first side of the wafer. A semiconductor functional device is fabricated on the first side of the wafer and interconnected with the interconnection contacts during the fabricating.

Abstract: A wafer level integration module and method for forming are disclosed. A construction includes semiconductor functional device fabrication carried out after interconnect structures are processed on a bare wafer. Interconnect structures are formed in a first side of the wafer. An insulation layer is deposited on the first side of the wafer to insulate walls of the interconnect structures. A conductive layer is deposited on the insulation layer filling the interconnect structures so as to contact the insulation layer on the walls of the interconnect structures. The conductive layer forms interconnection contacts on the first side of the wafer and interconnection vias extending into the wafer. The first conductive layer including the interconnection contacts is exposed on the first side of the wafer and a semiconductor functional device is formed on the first side of the wafer. The semiconductor functional device is interconnected with the interconnection contacts during the fabricating.

Abstract: A method and apparatus for manufacturing an integrated circuit (IC) device (90) is disclosed. A wafer (10) is first provided having a first or top surface and a second or bottom surface. The wafer may be a blank polished or unpolished silicon wafer or the like. High aspect ratio micro-structures (16) that are specifically designed to provide a die level interconnect configuration and mapping, are provided on the first blank surface (12) of the wafer. The wafer with preformed conductive interconnect microstructures (16) are further processed for device fabrication, for example, at the wafer fabrication facilities. Once the front side (12) devices are fabricated, the silicon material (20) is then removed from a second side (14) of the device wafer (10), opposite the first side, to expose the high temperature conductive interconnect microstructures (16). Contacts are formed on the second side of the device wafer using conductive metal.

Abstract: A method and apparatus for manufacturing an integrated circuit (IC) device (90) is disclosed. A wafer (10) is first provided having a first or top surface and a second or bottom surface. The wafer may be a blank polished or unpolished silicon wafer or the like. High aspect ratio micro-structures (16) that are specifically designed to provide a die level interconnect configuration and mapping, are provided on the first blank surface (12) of the wafer. The wafer with preformed conductive interconnect microstructures (16) are further processed for device fabrication, for example, at the wafer fabrication facilities. Once the front side (12) devices are fabricated, the silicon material (20) is then removed from a second side (14) of the device wafer (10), opposite the first side, to expose the high temperature conductive interconnect microstructures (16). Contacts are formed on the second side of the device wafer using conductive metal.

Abstract: A method of manufacturing an integrated circuit (IC) device is disclosed. A wafer including multiple dies is processed to form solder bumps at the bond pad locations. A conductive substrate is patterned for routing traces and connection pads and partially etched. Routers are formed to electrically route a connection pad to the interior of its corresponding routing terminals. The etched connection pads corresponds to the plurality of bond pad locations of the IC chip. The bumped IC chip is aligned and attached to the conductive substrate through the connection pads and solder bumps. The attached IC chip and the first side of the conductive substrate are then encapsulated. Un-processed conductive material is then removed from a second side of the substrate, opposite the first side, to expose the routers and routing terminals.

Abstract: A method of manufacturing an integrated circuit (IC) device is disclosed. A wafer including multiple dies is processed to form solder bumps at the bond pad locations. A conductive substrate is patterned for routing traces and connection pads and partially etched. Routers are formed to electrically route a connection pad to the interior of its corresponding routing terminals. The etched connection pads corresponds to the plurality of bond pad locations of the IC chip. The bumped IC chip is aligned and attached to the conductive substrate through the connection pads and solder bumps. The attached IC chip and the first side of the conductive substrate are then encapsulated. Un-processed conductive material is then removed from a second side of the substrate, opposite the first side, to expose the routers and routing terminals.

Abstract: A new method of fabricating solder bumps in the manufacture of an integrated circuit device has been achieved. Contact pads are provided overlying a semiconductor substrate. A passivation layer is provided overlying the contact pads. The passivation layer has openings that expose a top surface of the contact pads. A sacrificial layer is deposited overlying the passivation layer and the exposed top surface of the contact pads. The sacrificial layer is not wettable to solder. Under bump metallurgy (UBM) caps may be formed either by deposition and patterning of a UBM layer stack or by selective electroless deposition of a material such as nickel and gold. An aperture mask is formed overlying the sacrificial layer. The aperture mask has openings that expose a part of the sacrificial layer overlying the contact pads. A solder layer is printed into the openings in the aperture mask. The solder layer is reflowed to form solder bumps overlying the contact pads. The aperture mask is stripped away.

Abstract: A new method of fabricating solder bumps in the manufacture of an integrated circuit device has been achieved. Contact pads are provided overlying a semiconductor substrate. A passivation layer is provided overlying the contact pads. The passivation layer has openings that expose a top surface of the contact pads. A sacrificial layer is deposited overlying the passivation layer and the exposed top surface of the contact pads. The sacrificial layer is not wettable to solder. Under bump metallurgy (UBM) caps may be formed either by deposition and patterning of a UBM layer stack or by selective electroless deposition of a material such as nickel and gold. An aperture mask is formed overlying the sacrificial layer. The aperture mask has openings that expose a part of the sacrificial layer overlying the contact pads. A solder layer is printed into the openings in the aperture mask. The solder layer is reflowed to form solder bumps overlying the contact pads. The aperture mask is stripped away.