Abstract: A method for generating high order harmonic frequencies includes: providing a piezoelectric resonant film; and inputting a driving signal with a single tone frequency for driving the piezoelectric resonant film to oscillate in a non-linear region so as to generate a plurality of high order harmonic frequencies. Therefore, the quantity of the high order harmonic frequencies can be adjusted by applying an electrical controlling method.

Abstract: An acceleration sensing structure includes a frame, a proof mass, a gimbal and at least two outer flexible arms. The proof mass is suspended from the frame and has a first thickness. The proof mass is surrounded by and connected to the gimbal. The gimbal has a second thickness. The at least two outer flexible arms are connected between the gimbal and the frame, and the at least two outer flexible arms are arranged symmetrically. The second thickness is larger than or equal to one-half of the first thickness and is smaller than or equal to the first thickness, and when the proof mass moves, the at least two outer flexible arms are deformed.

Abstract: An acceleration sensing structure includes a frame, a proof mass, a gimbal and at least two outer flexible arms. The proof mass is suspended from the frame and has a first thickness. The proof mass is surrounded by and connected to the gimbal. The gimbal has a second thickness. The at least two outer flexible arms are connected between the gimbal and the frame, and the at least two outer flexible arms are arranged symmetrically. The second thickness is larger than or equal to one-half of the first thickness and is smaller than or equal to the first thickness, and when the proof mass moves, the at least two outer flexible arms are deformed.

Abstract: A method for generating high order harmonic frequencies includes: providing a piezoelectric resonant film; and inputting a driving signal with a single tone frequency for driving the piezoelectric resonant film to oscillate in a non-linear region so as to generate a plurality of high order harmonic frequencies. Therefore, the quantity of the high order harmonic frequencies can be adjusted by applying an electrical controlling method.

Abstract: The present disclosure provides a resonator which resonates in a bulk acoustic wave mode. The resonator includes a resonator body, at least one transducer arm and a substrate. The resonator body is deformed at least along a first direction. The transducer arm is connected to the resonator body along the first direction and includes a base, a piezoelectric layer and an electrode layer. The base includes a first end connected to the resonator body. The piezoelectric layer is disposed above the base but not extended to the resonator body, and the electrode layer is disposed above the piezoelectric layer but not extended to the resonator body. The substrate is for securing the transducer arm such that the resonator body is suspended.

Abstract: The present disclosure provides a resonator which resonates in a bulk acoustic wave mode. The resonator includes a resonator body, at least one transducer arm and a substrate. The resonator body is deformed at least along a first direction. The transducer arm is connected to the resonator body along the first direction and includes a base, a piezoelectric layer and an electrode layer. The base includes a first end connected to the resonator body. The piezoelectric layer is disposed above the base but not extended to the resonator body, and the electrode layer is disposed above the piezoelectric layer but not extended to the resonator body. The substrate is for securing the transducer arm such that the resonator body is suspended.