Abstract: A method for generating plasma processing system component analysis software is provided. The method includes defining component specifications for a plurality of components. Each of the plurality of components implements at least one of a user-interface function, a logic operation function, an input function, and an output function for analyzing a plasma processing system component. Defining includes selecting the plurality of components from a component panel of a visual integrated design editor architecture (VIDEA), thereby causing the plurality of components to be disposed in a layout format in the VIDEA. Defining also includes specifying properties of each of the plurality of components by performing at least one of selecting from predefined properties and defining parameters for the properties. The method also includes saving the plurality of components after the defining in a mark-up language configured to be executable by a browser without requiring prior compiling.

Abstract: A method for testing a component configured to be installed in a plasma processing system. The method includes providing an ATAC (Automated Test and Characterization) fixture, which includes a system control software package ( SCS) that is representative of production system control software, a data manager module configured to obtain specification data from a database over a computer network, a test manager module configured to execute a set of tests designed to test the component, a SCS interface engine configured to provide the set of tests to the SCS, and a data analysis module configured to provide computer-implemented data analysis tool for analyzing test data obtained from the testing the component. The method also includes coupling the ATAC fixture to the component to enable the SCS in the ATAC fixture to test the component utilizing the set of tests and at least a portion of the specification data.

Abstract: A testing arrangement for testing a plasma cluster tool having system control software (SCS) for controlling the plasma cluster tool during production. The testing arrangement includes a data manager module for obtaining, via a computer network, specification data pertaining to a component of the plasma cluster tool. The testing arrangement further includes a test manager module configured to provide a set of tests for testing the component, the set of tests incorporating data obtained in the specification data. The testing arrangement additionally includes a SCS interface engine configured to communicate the set of tests with the system control software of the plasma cluster tool, thereby enabling the SCS to execute at least a test in the set of tests to test the component.

Abstract: A pneumatic air cylinder having a normally open solenoid valve provides emergency recovery power to a wafer heater assembly during interruption of an electric power supply. The wafer heater assembly includes a well formed in an upper surface that is adapted to receive and align a wafer during wafer processing. During normal operating conditions, the air cylinder is out of the way of the motion of an electric motor that drives the wafer heater assembly. In the event that the electric power is interrupted, the normally open valve is opened, allowing air to operate the cylinder, drive the heater assembly down, and move the wafer out of the heater well before the heater assembly cools sufficiently to contract and break the wafer. When electric power is resumed, the air supply to the air cylinder is shut off, and the heater is rehomed by the electric motor. Such procedure unlatches a system command to allow the electric motor to position the pneumatic cylinder for future operation.