Patents by Inventor Gebhard Stittmatter

Gebhard Stittmatter has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Heat-treatment system and method
    Patent number: 7019264
    Abstract: This invention relates to a system and a method for the heat treatment of substrates, incorporating an annular heat-treatment section with a rotary table designed to accept substrate holders, at least two of which substrate holders are positioned one behind the other in heat-treatment zones that extend in a radial spoke pattern around the center of the rotary table.
    Type: Grant
    Filed: April 6, 2004
    Date of Patent: March 28, 2006
    Assignee: Unaxis Balzers Ltd.
    Inventors: Thomas Eisenhammer, Thomas Matt, Gebhard Stittmatter, Klaus Zapf