Patents by Inventor Gee Hoey

Gee Hoey has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate gripper apparatus and methods
    Patent number: 9352471
    Abstract: A substrate gripper apparatus is provided. Substrate gripper apparatus includes a body, a first slide member moveable relative to the body, a first finger mounting member coupled to the first slide member, a first lower finger coupled to the first finger mounting member, and a first pivoting finger coupled to the first finger mounting member. First pivoting member may impose a force on a substrate due to gravity. Methods of operating the substrate gripper apparatus as well as other aspects are provided.
    Type: Grant
    Filed: January 21, 2015
    Date of Patent: May 31, 2016
    Assignee: Applied Materials, Inc.
    Inventors: Edwin Velazquez, Gee Hoey, Jim K. Atkinson
  • Pad conditioner cleaning apparatus
    Patent number: 6358124
    Abstract: A chemical mechanical polishing apparatus includes a pad conditioner having a conditioner head, a cleaning cup for receiving and cleaning the conditioner head of the pad conditioner, and a fluid dispenser for dispensing a cleaning fluid onto the conditioner head.
    Type: Grant
    Filed: December 29, 1998
    Date of Patent: March 19, 2002
    Assignee: Applied Materials, Inc.
    Inventors: Raijiro Koga, Hiromi Tsuruta, Takashi Kumagai, Gee Hoey, Brian J. Brown, Boris Fishkin, Fred C. Redeker, Bruce Lu, Rex Lu, K. Y. Wang, Roland Shu
  • Pad cleaning brush for chemical mechanical polishing apparatus and method of making the same
    Patent number: 6224470
    Abstract: A pad cleaning brush and method for making the same is used in conjunction with spray rinse water to thoroughly clean a polishing pad of a chemical-mechanical polishing apparatus after a wafer has been polished. The bristles of the brush are securely retained within the brush by a welding process. This prevents the bristles from remaining on the polishing pad after the cleaning operation, thereby preventing the remaining bristles from damaging a subsequently polished wafer.
    Type: Grant
    Filed: September 29, 1999
    Date of Patent: May 1, 2001
    Assignee: Applied Materials, Inc.
    Inventors: Gee Hoey, Manoohcer Birang
  • Pad conditioner cleaning apparatus
    Patent number: 6217430
    Abstract: A cleaning cup for holding and cleaning a pad conditioner having a conditioner head, the cleaning cup includes a spray nozzle for spraying a cleaning solution on a top side of the conditioner head. The cleaning cup further includes a plurality of support pins extending upwards from a base of the cleaning cup to receive the conditioner head thereon.
    Type: Grant
    Filed: November 2, 1998
    Date of Patent: April 17, 2001
    Assignee: Applied Materials, Inc.
    Inventors: Raijiro Koga, Hiromi Tsuruta, Takashi Kumagai, Gee Hoey, Brian J. Brown, Boris Fishkin, Fred C. Redeker