Abstract: In an apparatus and a method for liquid transfer imprint lithography, the apparatus includes a roll unit, a plane unit and a control unit. The roll unit includes a roll stamp, a horizontal moving stage, a roll angular compensating stage and a roll rotating part. The plane unit is disposed under the roll unit and includes a first substrate, a first fixing chuck, a first substrate driving part, a second substrate, a second fixing chuck and a second substrate driving part. The control unit controls an operation of the roll unit and the plane unit.

Abstract: In an apparatus and a method for liquid transfer imprint lithography, the apparatus includes a roll unit, a plane unit and a control unit. The roll unit includes a roll stamp, a horizontal moving stage, a roll angular compensating stage and a roll rotating part. The plane unit is disposed under the roll unit and includes a first substrate, a first fixing chuck, a first substrate driving part, a second substrate, a second fixing chuck and a second substrate driving part. The control unit controls an operation of the roll unit and the plane unit.

Abstract: An imprinting apparatus including a plate unit, and a plurality of imprinting modules provided on a lower surface of the plate unit. Each imprinting module is self-aligned by a compliance of six degree of freedom and vertically moved along with the plate unit by a controller. The imprint module is independently self-aligned in response to surface conditions of an objective material to compensate for a relative pose error thereof, such that a pattern formed on a lower end of the imprinting module can be imprinted on an upper surface of the objective material within a predetermined unit range, and a sequence of imprinting the pattern of the imprinting module on the objective material can be variously controlled.

Abstract: A method and apparatus for measuring the three-dimensional surface shape of an object using color informations of light reflected by the object. The method and apparatus for measuring the three-dimensional surface shape of the object, in which a real-time measurement of the three-dimensional surface is performed by projecting a beam of light having color information onto the object and detecting color distribution information according to levels of the object, thereby obtaining level information of the object.

Abstract: A method and apparatus for measuring the three-dimensional surface shape of an object using color informations of light reflected by the object. The method and apparatus for measuring the three-dimensional surface shape of the object, in which a real-time measurement of the three-dimensional surface is performed by projecting a beam of light having color information onto the object and detecting color distribution information according to levels of the object, thereby obtaining level information of the object.

Abstract: A method and a recording medium for measuring three-dimensional thickness profile and refractive index of transparent dielectric thin-film with some patterns or not, which is fabricated in the semiconductor and related industrial field, using white-light scanning interferometry is provided. A method for measuring a thickness profile using white-light scanning interferometry in optical system includes the following steps. A first step is to extracting a phase graph by acquiring an interference signal and performing Fourier transform. A second step is to extracting a mathematical phase graph through modeling of a measurement object. And a third step is to measuring a profile value and a thickness value by applying an optimization technique to an error function determined by using phase values which is acquired from said first step and said second step.