Abstract: The present invention provides an imprinting apparatus, including a plate unit, and a plurality of imprinting modules provided on a lower surface of the plate unit. Each of the plurality of imprinting modules includes an actuator provided under the plate unit to be independently actuated by the controller, with a mold attached to a lower surface of the actuator and having a pattern on a lower surface thereof, so that the mold of the actuator is in surface contact with the upper surface of the objective material, a bonding unit to attach the mold to the lower surface of the actuator, and a compensator including an outer frame provided on the lower surface of the plate unit, and an inner frame placed in the outer frame so that the inner frame is self-aligned by the compliance of six degrees of freedom.