Patents by Inventor Geert Doumen

Geert Doumen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Megasonic cleaner and dryer system
    Patent number: 6928751
    Abstract: An apparatus includes a rotatable chuck for supporting a substrate and a splash guard. The splash guard surrounds the chuck and surrounds a substrate mounted on the chuck. The splash guard has a portion that deflects fluid being flung off the substrate by centrifugal action in a manner so as to not splash back onto the substrate. The splash guard is moveable between a process position in which the upper annular edge of the splash guard extends above the chuck and a substrate on the chuck, and a load/unload position in which the splash guard is tilted so that one side of the upper annular edge is below an upper edge of the chuck. The movement of the splash guard facilitates loading and unloading of a substrate.
    Type: Grant
    Filed: June 12, 2002
    Date of Patent: August 16, 2005
    Assignees: Goldfinger Technologies, LLC, Interuniversitair Microelektronica Centrum (IMEC)
    Inventors: Chad M. Hosack, Jeffrey M. Lauerhaas, Mario E. Bran, Raoul Standt, Paul Patel, Yi Wu, Geert Doumen, Paul Mertens
  • Megasonic cleaner and dryer system
    Publication number: 20020185154
    Abstract: An apparatus includes a rotatable chuck for supporting a substrate and a splash guard. The splash guard surrounds the chuck and surrounds a substrate mounted on the chuck. The splash guard has a portion that deflects fluid being flung off the substrate by centrifugal action in a manner so as to not splash back onto the substrate. The splash guard is moveable between a process position in which the upper annular edge of the splash guard extends above the chuck and a substrate on the chuck, and a load/unload position in which the splash guard is tilted so that one side of the upper annular edge is below an upper edge of the chuck. The movement of the splash guard facilitates loading and unloading of a substrate.
    Type: Application
    Filed: June 12, 2002
    Publication date: December 12, 2002
    Inventors: Chad M. Hosack, Jeffrey M. Lauerhaas, Mario E. Bran, Raoul Standt, Pankaj T. Patel, Yi Wu, Geert Doumen, Paul Mertens