Patents by Inventor Gem-Bi SHIM

Gem-Bi SHIM has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • ETCHANT COMPOSITIONS FOR NITRIDE LAYERS AND METHODS OF MANUFACTURING SEMICONDUCTOR DEVICES USING THE SAME
    Publication number: 20160126107
    Abstract: An etchant composition for nitride layers includes phosphoric acid in an amount ranging from about 80 weight percent to about 90 weight percent, a silicon-fluorine compound in an amount ranging from about 0.02 weight percent to about 0.1 weight percent, and a remainder of water, based on a total weight of the etchant composition. The silicon-fluorine compound includes a bond between a silicon atom and a fluorine atom (Si—F bonding).
    Type: Application
    Filed: April 20, 2015
    Publication date: May 5, 2016
    Inventors: Jun-Ing KIL, Cheol-Won BANG, Hak-Muk KIM, Young-Su JANG, Gem-Bi SHIM