Patents by Inventor Gen Hashiguchi

Gen Hashiguchi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10833607
    Abstract: An electret element includes: an Si layer, an SiO2 layer formed at a surface of the Si layer; and an electret formed at the SiO2 layer near an interface of the SiO2 layer and the Si layer.
    Type: Grant
    Filed: February 9, 2016
    Date of Patent: November 10, 2020
    Assignees: The University of Tokyo, Saginomiya Seisakusho, Inc.
    Inventors: Hiroyuki Fujita, Gen Hashiguchi, Hisayuki Ashizawa, Hiroyuki Mitsuya, Kazunori Ishibashi
  • Patent number: 10511914
    Abstract: An electret element includes: an electret film that contains silicon oxide; and a protective film formed over the electret film and constituted of aluminum oxide deposited through an atomic layer deposition method.
    Type: Grant
    Filed: October 14, 2015
    Date of Patent: December 17, 2019
    Assignees: National University Corporation Shizuoka University, Saginomiya Seishakusho, Inc.
    Inventors: Gen Hashiguchi, Yuki Nishimori, Shinichi Arioka, Masato Suzuki, Kazunori Ishibashi
  • Patent number: 10405103
    Abstract: An electret element includes: an electret film that contains silicon oxide; and a protective film formed over the electret film and constituted of aluminum oxide deposited through an atomic layer deposition method.
    Type: Grant
    Filed: September 13, 2018
    Date of Patent: September 3, 2019
    Assignees: National University Corporation Shizuoka University, Saginomiya Seisakusho, Inc.
    Inventors: Gen Hashiguchi, Yuki Nishimori, Shinichi Arioka, Masato Suzuki, Kazunori Ishibashi
  • Patent number: 10340818
    Abstract: An actuator includes: an electrostatic actuation mechanism including a stationary electrode and a movable electrode; a first movable part driven by the electrostatic actuation mechanism; a first elastic support part that elastically supports the first movable part; an electret formed in at least one of the stationary electrode and the movable electrode; and a drive control unit that controls application of voltage to the electrostatic actuation mechanism. In the actuator a plurality of stable states are set in which the first movable part is positioned at a stable position at which an electrostatic force generated by the electret matches with an elastic force exerted by the first elastic support part or at a stable position near such stable position. By applying a voltage to the electrostatic actuation mechanism, the first movable part may be displaced from any stable position to another stable position.
    Type: Grant
    Filed: July 30, 2014
    Date of Patent: July 2, 2019
    Assignees: National University Corporation Shizuoka University, OMRON Corporation, KABUSHIKI KAISHA SAGINOMIYA SEISAKUSHO
    Inventors: Masato Suzuki, Akito Mori, Gen Hashiguchi, Tatsuhiko Sugiyama, Hiroshi Imamoto, Masatoshi Oba, Hiroyuki Mitsuya, Hisayuki Ashizawa, Kazunori Ishibashi
  • Publication number: 20190014419
    Abstract: An electret element includes: an electret film that contains silicon oxide; and a protective film formed over the electret film and constituted of aluminum oxide deposited through an atomic layer deposition method.
    Type: Application
    Filed: September 13, 2018
    Publication date: January 10, 2019
    Inventors: Gen HASHIGUCHI, Yuki NISHIMORI, Shinichi ARIOKA, Masato SUZUKI, Kazunori ISHIBASHI
  • Patent number: 9915576
    Abstract: A pressure sensor includes: a fixed part; a ring-like oscillator that is supported on the fixed part by a plurality of support beams; a plurality of electrodes that are provided on the fixed part and arranged in an oscillating direction of the ring-like oscillator with a gap; electret films that are formed on either one of opposite surfaces of the ring-like oscillator and the electrodes.
    Type: Grant
    Filed: September 29, 2014
    Date of Patent: March 13, 2018
    Assignees: The University of Tokyo, Kabushiki Kaisha Saginomiya Seisakusho
    Inventors: Hiroyuki Fujita, Gen Hashiguchi, Hiroyuki Mitsuya, Hisayuki Ashizawa
  • Publication number: 20180041140
    Abstract: An electret element includes: an Si layer, an SiO2 layer formed at a surface of the Si layer; and an electret formed at the SiO2 layer near an interface of the SiO2 layer and the Si layer.
    Type: Application
    Filed: February 9, 2016
    Publication date: February 8, 2018
    Inventors: Hiroyuki FUJITA, Gen HASHIGUCHI, Hisayuki ASHIZAWA, Hiroyuki MITSUYA, Kazunori ISHIBASHI
  • Publication number: 20170318394
    Abstract: An electret element includes: an electret film that contains silicon oxide; and a protective film formed over the electret film and constituted of aluminum oxide deposited through an atomic layer deposition method.
    Type: Application
    Filed: October 14, 2015
    Publication date: November 2, 2017
    Inventors: Gen HASHIGUCHI, Yuki NISHIMORI, Shinichi ARIOKA, Masato SUZUKI, Kazunori ISHIBASHI
  • Publication number: 20160282209
    Abstract: A pressure sensor includes: a fixed part; a ring-like oscillator that is supported on the fixed part by a plurality of support beams; a plurality of electrodes that are provided on the fixed part and arranged in an oscillating direction of the ring-like oscillator with a gap; electret films that are formed on either one of opposite surfaces of the ring-like oscillator and the electrodes.
    Type: Application
    Filed: September 29, 2014
    Publication date: September 29, 2016
    Applicants: THE UNIVERSITY OF TOKYO, KABUSHIKI KAISKA SAGINOMIYA SEISAKUSHO
    Inventors: Hiroyuki FUJITA, Gen HASHIGUCHI, Hiroyuki MITSUYA, Hisayuki ASHIZAWA
  • Patent number: 9425710
    Abstract: An electrostatic induction conversion device includes: an input-side electrostatic actuator that includes a first fixed electrode and a first movable electrode facing the first fixed electrode; and an output-side electrostatic actuator that includes a second movable electrode linked to the first movable electrode via a link mechanism member, which increases or decreases a displacement quantity representing an extent of displacement occurring at the first movable electrode, and a second fixed electrode facing the second movable electrode, wherein: a permanently charged layer is deposited on an electrode surface either on a movable electrode side or on a fixed electrode side, at the input-side electrostatic actuator and the output-side electrostatic actuator.
    Type: Grant
    Filed: August 26, 2013
    Date of Patent: August 23, 2016
    Assignees: AOI Electronics Co., Ltd., National University Corporation Shizuoka University
    Inventors: Masato Suzuki, Hiroki Hayashi, Gen Hashiguchi, Tatsuhiko Sugiyama
  • Publication number: 20160204716
    Abstract: An actuator includes: an electrostatic actuation mechanism including a stationary electrode and a movable electrode; a first movable part driven by the electrostatic actuation mechanism; a first elastic support part that elastically supports the first movable part; an electret formed in at least one of the stationary electrode and the movable electrode; and a drive control unit that controls application of voltage to the electrostatic actuation mechanism. In the actuator a plurality of stable states are set in which the first movable part is positioned at a stable position at which an electrostatic force generated by the electret matches with an elastic force exerted by the first elastic support part or at a stable position near such stable position. By applying a voltage to the electrostatic actuation mechanism, the first movable part may be displaced from any stable position to another stable position.
    Type: Application
    Filed: July 30, 2014
    Publication date: July 14, 2016
    Inventors: Masato SUZUKI, Akito MORI, Gen HASHIGUCHI, Tatsuhiko SUGIYAMA, Hiroshi IMAMOTO, Masatoshi OBA, Hiroyuki MITSUYA, Hisayuki ASHIZAWA, Kazunori ISHIBASHI
  • Patent number: 9224415
    Abstract: According to one embodiment, a microprobe includes a supporting base, an insulating layer, and an electrode layer arrayed in a first direction in this order. A principal surface of the microprobe is formed in a second direction different from the first direction. A step is formed on at least the electrode layer on the principal surface, and the electrode layer is partitioned into a first area and a second area by the step.
    Type: Grant
    Filed: March 25, 2011
    Date of Patent: December 29, 2015
    Assignees: Kabushiki Kaisha Toshiba, The University of Tokyo
    Inventors: Yongfang Li, Yasushi Tomizawa, Akihiro Koga, Gen Hashiguchi, Masakazu Sugiyama
  • Publication number: 20150070941
    Abstract: An electrostatic induction conversion device includes: an input-side electrostatic actuator that includes a first fixed electrode and a first movable electrode facing the first fixed electrode; and an output-side electrostatic actuator that includes a second movable electrode linked to the first movable electrode via a link mechanism member, which increases or decreases a displacement quantity representing an extent of displacement occurring at the first movable electrode, and a second fixed electrode facing the second movable electrode, wherein: a permanently charged layer is deposited on an electrode surface either on a movable electrode side or on a fixed electrode side, at the input-side electrostatic actuator and the output-side electrostatic actuator.
    Type: Application
    Filed: August 26, 2013
    Publication date: March 12, 2015
    Applicant: National University Corporation Shizuoka Universit y
    Inventors: Masato Suzuki, Hiroki Hayashi, Gen Hashiguchi, Tatsuhiko Sugiyama
  • Patent number: 8770043
    Abstract: An object of this invention is to detect an external force or acceleration with good sensitivity using a simple configuration. An external force detection sensor comprises a comb electrode including a fixed electrode having a plurality of fixed combtooth portions and a movable electrode having a plurality of movable combtooth portions inserted between the fixed combtooth portions; a power supply connected to the fixed electrode and the movable electrode in order to cause vibration of the movable electrode at a prescribed resonance frequency through an electrostatic force on the fixed electrode; and detection means for detecting an external force based on a change in electrical characteristics between the fixed electrode and the movable electrode when the movable electrode is caused to vibrate.
    Type: Grant
    Filed: June 5, 2009
    Date of Patent: July 8, 2014
    Assignee: National University Corporation Shizuoka University
    Inventor: Gen Hashiguchi
  • Patent number: 8331212
    Abstract: According to one embodiment, a MEMS memory microprobe includes a probe tip, a lever, and a base. The probe tip is arranged to oppose a recording medium and is brought into contact with the recording medium to perform recording or reproduction of information when a current or voltage is applied between them. In the probe tip, a plurality of electrodes used in the recording or reproduction and a plurality of support portions which form the probe tip together with the electrodes are alternately arranged, and the electrodes and the support portions form a single plane which opposes the recording medium.
    Type: Grant
    Filed: January 28, 2011
    Date of Patent: December 11, 2012
    Assignees: Kabushiki Kaisha Toshiba, The University of Tokyo
    Inventors: Yongfang Li, Yasushi Tomizawa, Gen Hashiguchi, Masakazu Sugiyama
  • Publication number: 20120062213
    Abstract: According to one embodiment, a microprobe includes a supporting base, an insulating layer, and an electrode layer arrayed in a first direction in this order. A principal surface of the microprobe is formed in a second direction different from the first direction. A step is formed on at least the electrode layer on the principal surface, and the electrode layer is partitioned into a first area and a second area by the step.
    Type: Application
    Filed: March 25, 2011
    Publication date: March 15, 2012
    Inventors: Yongfang Li, Yasushi Tomizawa, Akihiro Koga, Gen Hashiguchi, Masakazu Sugiyama
  • Publication number: 20110194398
    Abstract: According to one embodiment, a MEMS memory microprobe includes a probe tip, a lever, and a base. The probe tip is arranged to oppose a recording medium and is brought into contact with the recording medium to perform recording or reproduction of information when a current or voltage is applied between them. In the probe tip, a plurality of electrodes used in the recording or reproduction and a plurality of support portions which form the probe tip together with the electrodes are alternately arranged, and the electrodes and the support portions form a single plane which opposes the recording medium.
    Type: Application
    Filed: January 28, 2011
    Publication date: August 11, 2011
    Inventors: Yongfang Li, Yasushi Tomizawa, Gen Hashiguchi, Masakazu Sugiyama
  • Publication number: 20110138931
    Abstract: An object of this invention is to detect an external force or acceleration with good sensitivity using a simple configuration. An external force detection sensor comprises a comb electrode including a fixed electrode having a plurality of fixed combtooth portions and a movable electrode having a plurality of movable combtooth portions inserted between the fixed combtooth portions; a power supply connected to the fixed electrode and the movable electrode in order to cause vibration of the movable electrode at a prescribed resonance frequency through an electrostatic force on the fixed electrode; and detection means for detecting an external force based on a change in electrical characteristics between the fixed electrode and the movable electrode when the movable electrode is caused to vibrate.
    Type: Application
    Filed: June 5, 2009
    Publication date: June 16, 2011
    Inventor: Gen Hashiguchi
  • Patent number: 7849515
    Abstract: A nanotweezer (1) according to the present invention includes: a supporting member (25); an observation probe (10) that projects out from the supporting member (25), and is used when observing a surface of a specimen; a movable arm (20) that is arranged next to the observation probe (10) projecting out from the supporting member (25), and makes closed or opened between the observation probe (10) and the movable arm (20) to hold or release the specimen held between the observation probe (10) and the movable arm (20); and a drive mechanism that drives the movable arm (20) so as to make closed or opened between the observation probe (10) and the movable arm (20), and the supporting member (25), the observation probe (10) and the movable arm (20) are each formed by processing a semiconductor wafer (30) through a photolithography process.
    Type: Grant
    Filed: November 22, 2005
    Date of Patent: December 7, 2010
    Assignees: National University Corporation Kagawa University, AOI Electronics Co., Ltd.
    Inventors: Gen Hashiguchi, Maho Hosogi, Takashi Konno
  • Publication number: 20100129610
    Abstract: Silicon in prismatic shape is produced by using a silicon wafer with (110) surface and sequentially carrying out an alignment configuration forming step for forming alignment configurations having surfaces that are along two (111) surfaces perpendicular to a substrate surface inside the silicon wafer, a primary anisotropic etching step for forming perpendicular walls having wall surfaces aligned to one of these (111) surfaces, and a secondary anisotropic etching step for forming silicon in the prismatic shape having wall surfaces aligned to the other of these (111) surfaces with respect to the perpendicular walls.
    Type: Application
    Filed: May 14, 2007
    Publication date: May 27, 2010
    Applicant: NATIONAL UNIVERSITY CORPORATION KAGAWA UNIVERSITY
    Inventors: Fumikazu Oohira, Gen Hashiguchi, Shinya Nagao