Abstract: Motion of a substrate-transporting robot arm is controlled in order to compensate for inaccuracies and deflections encountered during operation. The compensation is effected by synchronizing elevational and planar motions of the robot arm such that the trajectory of the substrate is made coincident with the object axis of the substrate. The substrate may be a semiconductor wafer, an LCD panel or an end effector of the robot arm. The synchronized motion is achieved using a controller issuing control signals to arm actuating means based on synchronization algorithms developed during analytical or experimental robot learning sessions.

Abstract: A substrate handling system is provided with a robot having the dual function of a removing and replacing substrate-containing pod doors and load lock chamber doors, and of transporting the substrates between the pods and various processing stations. The robot is equipped with an end effector having sockets into which interchangeable tools for implementing the various functions are removably mounted. The tools are retrieved from respective parking locations disposed within the system micro environment, and automatic interchangeability of the tools is facilitated by a novel socket mechanism which engages and disengages the tools to the robot arm without introducing contaminants into the micro environment.

Abstract: An improvement is set forth in a robotic arm structure which includes at least two links. .theta. motion is provided about a primary axis at the proximal end portion of the proximalmost of the links. R motion proceeds radially from the primary axis whereby the distal end portion of the distalmost of the links can be moved in a radially extending straight line. At least two independent end effectors are pivotally mounted for rotation relative to the distal end portion of the distalmost link about an end effector axis which is parallel to the primary axis. The structure is improved by adding independent yaw motors for rotating the end effectors independently.

Abstract: A uni-directional tilt mechanism for supporting a robotic arm mechanism or other structures includes a simplified system of two motors for tilting a support platform in one dimension. The uni-directional tilt platforms according to the invention may be stacked to provide a universally tiltable stacked platform system for supporting a robotic arm mechanism. The multi-directional tilt stacked platform system can be used to align a Z-axis of a transferred substrate with cassettes or workstations in which substrate is to be placed by the robot.

Abstract: A planarity teaching station includes one or more proximity sensors arranged to reflect light off a surface to determine a plane in which a substrate is positioned by a robotic arm. The plane of the substrate is then automatically adjusted by changing a Z-axis of a universally tiltable robot base or in another manner, based on the data provided by the planarity teaching station. The adjustment of the substrate or end effector plane allows substrates to be removed from and delivered to various cassettes and workstations of a substrate processing system without damage to the substrate caused by end effector misalignment.

Abstract: A tilting elevator is set forth. A rigid frame has a base, a structurally rigid structure extending upwardly from the base, and a flange attached to the structure top. The flange is generally parallel to the base. A movable elevatable structure is telescopically mounted to the rigid frame. The elevatable structure comprises upper and lower spaced apart generally parallel plates. At least three generally parallel rods extend between the plates and are connected to them by universal joints. A motor system is supported rigidly relative to the base. Each of the rods is movable relative to the plates independently of each other rod. A robotic arm having R-, .theta.- and Z-motion can be mounted to the elevator. A mechanism is preferably attached to the bottom plate of the elevatable structure for increasing the stability of the system. With the addition of a sensor and using microprocessor control, canted workpieces can be readily picked up.

Abstract: An improvement is set forth in a robotic arm structure which includes at least two links. .theta. motion is provided about a primary axis at the proximal end portion of the proximalmost of the links. R motion proceeds radially from the primary axis whereby the distal end portion of the distalmost of the links can be moved in a radially extending straight line. An end effector is pivotally mounted for rotation relative to the distal end portion of the distalmost link about an end effector axis which is parallel to the primary axis. The structure is improved by adding one or more a yaw motor, a roll motor and a pitch motor for rotating the wrist of the arm about the respective axes. A sensor array senses the R, .theta., Z and yaw, roll and/or pitch motions and creates and transmits electronic signals representative thereof to a computer controller which monitors and controls the R, .theta., Z and yaw, roll and/or pitch motions.

Abstract: An article positioning apparatus which includes a positioning arm structure on a rigid base structure and elevator structure. The base structure includes an upper flange and a lower flange secured to the upper flange by rigid members extending between the upper flange and the lower flange. The upper flange includes a bore therein. The elevator structure is positioned between the upper flange and the lower flange and itself includes an upper plate and a lower plate. The elevator structure coupled to the positioning arm structure through the bore in the upper flange. The elevator structure includes lead screw members having a respective upper end portion and a lower end portion, extending from the upper plate to the lower plate. In addition, the elevator structure includes a plurality of universal joints supported by the upper plate, one of said plurality of universal joints being associated with one of the lead screw members and being arranged to universally mount the upper plate to a respective lead screw.

Abstract: A tilting elevator is set forth. A rigid frame has a base, a structurally rigid structure extending upwardly from the base, and a flange attached to the structure top. The flange is generally parallel to the base. A movable elevatable structure is telescopically mounted to the rigid frame. The elevatable structure comprises upper and lower spaced apart generally parallel plates. At least three generally parallel rods extend between the plates and are connected to them by universal joints. A motor system is supported rigidly relative to the base. Each of the rods is movable relative to the plates independently of each other rod. A robotic arm having R-, .theta.- and Z-motion can be mounted to the elevator. A mechanism is preferably attached to the bottom plate of the elevatable structure for increasing the stability of the system. With the addition of a sensor and using microprocessor control, canted workpieces can be readily picked up.

Abstract: An apparatus provides .theta.-rotational motion about a Z-axis. The apparatus is improved as follows. A stop structure is carried by the apparatus and rotates with it. The stop structure has a detent engagement structure. A detent structure comprises a rotatable member located adjacent to the stop structure. The rotatable member is mounted for free rotation about an axis parallel to the Z-axis. The rotatable member defines a plurality of detentes which are adapted for sequential engagement with the detent engaging structure as the stop structure rotates about the Z-axis. A biasing structure serves for biasing the stop member to deter it from rotating. The biasing structure is overcome by action of the detent engaging structure with any one of the detentes and otherwise prevents rotation of the stop member. A stationary detent is located adjacent the stop member. The stationary detent engages with and halts rotation of the stop member beyond a selected rotational position.

Abstract: An improvement is set forth in a robotic arm structure which includes at least two links. .theta. motion is provided about a primary axis at the proximal end portion of the proximalmost of the links. R motion proceeds radially from the primary axis whereby the distal end portion of the distalmost of the links can be moved in a radially extending straight line. An end effector is pivotally mounted for rotation relative to the distal end portion of the distalmost link about an end effector axis which is parallel to the primary axis. The structure is improved by adding one or more of a yaw motor, a roll motor and a pitch motor for rotating the wrist of the arm about the respective axes. A sensor array senses the R, .theta., Z and yaw, roll and/or pitch motions and creates and transmits electronic signals representative thereof to a computer controller which monitors and controls the R, .theta., Z and yaw, roll and/or pitch motions.

Abstract: A robotic arm mechanism provides motion to an end effector via a motor driving a drive pulley. The drive pulley is connected by a belt structure to drive a driven pulley. The motor is mounted to a bracket. The bracket is slidably mounted to a base plate. The bracket is positioned relative to the base plate to provide desired tension in the belt structure. The bracket is fastened to the base plate by a bolt structure which extend from the base plate orthogonally to the motor. A threaded bore extends fully through the bracket from a distal mouth thereof removed from the driven pulley. The bore has an axis which is located generally in a plane which is contiguous with or parallel to the axes of the respective drive and driven pulleys. The bore extends from an opening facing the distal side downwardly to the base plate and towards the axis of the driven pulley. A set screw is engaged with the bore and extends through it such that the screw's tip forcibly engages with the base plate.

Abstract: A vertical positioner comprises a rigid frame. A rigid vertically extending structure extends upwardly from a base to its upper end portion. A generally horizontal flange forms the structure upper end portion. It has a central opening and at least two peripheral openings. A vertically movable structure is telescopically mounted to the frame. It comprises an upper plate located above the flange. A lower generally parallel plate is located below the flange. A pair of parallel rods extend between the plates and pass through flange bearings. A central tube is connected between the lower and upper plates and passes through the flange via bearings. A motor is supported rigidly relative to the base for motivating relative vertical motion.

Abstract: An arm structure includes either two or three links pivotally connected to one another with a hand or end effector at the distal end of the distal link. Straight line movement of the pivoting mounting place of the end effector is provided from a rotating drive wheel coaxial with the pivoting of the proximal end of the proximal link. A drive wheel coaxially with the pivot of the proximal end of the proximal link causes the first and second links to pivot about their pivot axis. This pivoting causes the first link to pivot about its proximal end and causes the end effector to pivot in the two link version and causes the second and third links to pivot about their pivot axis in the three link version. A housing can be present intermediate the ends of the first link to provide a gearing adjustment. Generally, .theta. and Z motors also are present. The arm structure is useful for moving wafers, hard computer discs, and the like for processing, loading, unloading, etc.

Abstract: A robotic arm comprises a plurality of sequentially pivotally attached links. The proximal end portion of the proximalmost of the links is pivotally mounted to a relatively static structure. An end effector structure has two substantially oppositely extending hands each capable of picking up a workpiece. The end effector structure is centrally pivotally mounted to the distal end portion of the distalmost link. The links, end effector structure and static structure are such as to allow the robotic arm to reverse across the pivot axis of the proximal end portion of the proximalmost of the links. A radial drive serves for driving the links in a manner such that the pivot axis of the central portion of the end effector structure moves only substantially linearly radially along a straight line passing through and perpendicular to the pivot axis of the proximal end portion of the proximalmost of the links and to the pivot axis of the central portion of the end effector structure.