Abstract: The alignment apparatus performs alignment of an object in a first direction along a surface of the object, based on a position of a predetermined target formed on the surface, and includes a holding unit that holds the object to be moved, an acquisition unit that acquires an image of the predetermined target formed on the surface of the object held by the holding unit, and a controller that drives the holding unit to realize a relative distance between the object and the acquisition unit in a second direction perpendicular to the surface of the object, a relative tilt between the object and the acquisition unit, or the distance and the tilt, the distance and the tilt being determined based on a correlation degree between the image acquired by the acquisition unit and a template, and detects a position of the predetermined target in the first direction based on the correlation degree.

Abstract: A position detection apparatus configured to detect a pattern including a plurality of pattern elements formed on an object includes a control unit configured to detect the pattern by performing pattern matching between a template including a plurality of feature points and the plurality of pattern elements. While, performing pattern matching, the control unit changes positions of the plurality of feature points such that a correlation between an image and the template is within a predetermined allowable range.

Abstract: A position detection apparatus configured to detect a pattern including a plurality of pattern elements formed on an object includes a control unit configured to detect the pattern by performing pattern matching between a template including a plurality of feature points and the plurality of pattern elements. While, performing pattern matching, the control unit changes positions of the plurality of feature points such that a correlation between an image and the template is within a predetermined allowable range.

Abstract: The present invention provides an evaluation method of evaluating a measurement condition of a position of a mark formed on a substrate, the method comprising: obtaining a mark signal representing an intensity distribution of reflected light by detecting the reflected light from the mark under the measurement condition; generating a plurality of signals from the mark signal by changing a first signal component of a first frequency included in the mark signal obtained in the obtaining; and estimating a position of the mark from each of the plurality of signals obtained in the generating, and obtaining a variation in estimated position of the mark as an evaluation index of the measurement condition.

Abstract: The alignment apparatus performs alignment of an object in a first direction along a surface of the object, based on a position of a predetermined target formed on the surface, and includes a holding unit that holds the object to be moved, an acquisition unit that acquires an image of the predetermined target formed on the surface of the object held by the holding unit, and a controller that drives the holding unit to realize a relative distance between the object and the acquisition unit in a second direction perpendicular to the surface of the object, a relative tilt between the object and the acquisition unit, or the distance and the tilt, the distance and the tilt being determined based on a correlation degree between the image acquired by the acquisition unit and a template, and detects a position of the predetermined target in the first direction based on the correlation degree.

Abstract: The present invention provides an imprint apparatus for performing an imprint process which includes molding of imprint material on a substrate with a mold and releasing of the mold from the molded imprint material, the apparatus including a substrate holder configured to hold the substrate, a mold holder configured to hold the mold, a driving device configured to perform driving, for the releasing of the mold, of at least one of the substrate holder and the mold holder, and a detector configured to detect completion of the releasing of the mold by the driving device.

Abstract: The present invention provides an evaluation method of evaluating a measurement condition of a position of a mark formed on a substrate, the method comprising: obtaining a mark signal representing an intensity distribution of reflected light by detecting the reflected light from the mark under the measurement condition; generating a plurality of signals from the mark signal by changing a first signal component of a first frequency included in the mark signal obtained in the obtaining; and estimating a position of the mark from each of the plurality of signals obtained in the generating, and obtaining a variation in estimated position of the mark as an evaluation index of the measurement condition.

Abstract: The present invention provides an imprint apparatus for performing an imprint process which includes molding of imprint material on a substrate with a mold and releasing of the mold from the molded imprint material, the apparatus including a substrate holder configured to hold the substrate, a mold holder configured to hold the mold, a driving device configured to perform driving, for the releasing of the mold, of at least one of the substrate holder and the mold holder, and a detector configured to detect completion of the releasing of the mold by the driving device.