Patents by Inventor Gennadij GLUCHMAN

Gennadij GLUCHMAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus of pretreatment of an electron gun chamber
    Patent number: 8878148
    Abstract: A method of pre-treating an ultra high vacuum charged particle gun chamber by ion stimulated desorption is provided. The method includes generating a plasma for providing a plasma ion source, and applying a negative potential to at least one surface in the gun chamber, wherein the negative potential is adapted for extracting an ion flux from the plasma ion source to the at least one surface for desorbing contamination particles from the at least one surface by the ion flux impinging on the at least one surface.
    Type: Grant
    Filed: September 23, 2010
    Date of Patent: November 4, 2014
    Assignee: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
    Inventors: Pavel Adamec, Ivo Li{hacek over (s)}ka, Gennadij Gluchman, Milan Snabl
  • METHOD AND APPARATUS OF PRETREATMENT OF AN ELECTRON GUN CHAMBER
    Publication number: 20110084219
    Abstract: A method of pre-treating an ultra high vacuum charged particle gun chamber by ion stimulated desorption is provided. The method includes generating a plasma for providing a plasma ion source, and applying a negative potential to at least one surface in the gun chamber, wherein the negative potential is adapted for extracting an ion flux from the plasma ion source to the at least one surface for desorbing contamination particles from the at least one surface by the ion flux impinging on the at least one surface.
    Type: Application
    Filed: September 23, 2010
    Publication date: April 14, 2011
    Applicant: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
    Inventors: Pavel ADAMEC, Ivo LISKA, Gennadij GLUCHMAN, Milan SNABL