Patents by Inventor Gennadiu ITOV

Gennadiu ITOV has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Si-CONTAINING FILM FORMING PRECURSORS AND METHODS OF USING THE SAME
    Publication number: 20190362961
    Abstract: Mono-substituted TSA precursor Si-containing film forming compositions are disclosed. The precursors have the formula: (SiH3)2N—SiH2—X, wherein X is selected from a halogen atom; an isocyanato group; an amino group; an N-containing C4-C10 saturated or unsaturated heterocycle; or an alkoxy group. Methods for forming the Si-containing film using the disclosed mono-substituted TSA precursor are also disclosed.
    Type: Application
    Filed: July 16, 2019
    Publication date: November 28, 2019
    Inventors: Jean-Marc GIRARD, Peng ZHANG, Antonio SANCHEZ, Manish KHANDELWAL, Gennadiu ITOV, Reno PESARESI