Patents by Inventor Geoffrey B. Wardman

Geoffrey B. Wardman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7290931
    Abstract: A pneumatic bearing for supporting a payload is disclosed. The pneumatic bearing comprises a bearing body having an active surface divided into a lift portion and a pre-load portion. A plurality of gas distribution channels are formed in the bearing body, wherein a first channel receives a compressed gas, a second channel supplies a vacuum to the pre-load portion of the active surface, and a third channel supplies a positive pressure gas to the lift portion of the active surface. The bearing body has an integral, pneumatically powered, vacuum generator having an inlet coupled to the first channel, a vacuum aperture coupled to the second channel, and an exhaust. The compressed gas may be supplied to the lift portion of the active surface either in parallel, in series, or in a series-parallel configuration, with the integrated vacuum generator. In an embodiment, the pneumatic bearing is reconfigurable.
    Type: Grant
    Filed: July 15, 2005
    Date of Patent: November 6, 2007
    Assignee: ASML Holding N.V.
    Inventors: Geoffrey B. Wardman, Santiago E. del Puerto