Patents by Inventor Geoffrey Hassall

Geoffrey Hassall has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for plasma treating a substrate
    Patent number: 7713377
    Abstract: Apparatus is provided for plasma treating a substrate. This has a chamber (2) and a plasma generator (4) which forms a plasma from one or more gases flowing within the chamber so as to produce one or more species for interacting with a substrate (8) placed within the chamber. A guide (12) is provided for directing the gas flow containing the species towards the substrate (8). When in use, the width of the plasma is greater than that of the substrate by an amount defining an outer region of plasma. The guide is adapted to direct the species from at least substantially all of the outer region of the plasma towards the substrate. A corresponding method of plasma treatment is also disclosed.
    Type: Grant
    Filed: September 30, 2004
    Date of Patent: May 11, 2010
    Assignee: Oxford Instruments Plasma Technology Limited
    Inventors: Michael Joseph Cooke, Geoffrey Hassall
  • Apparatus and method for plasma treating a substrate
    Publication number: 20070158305
    Abstract: Apparatus is provided for plasma treating a substrate. This has a chamber (2) and a plasma generator (4) which forms a plasma from one or more gases flowing within the chamber so as to produce one or more species for interacting with a substrate (8) placed within the chamber. A guide (12) is provided for directing the gas flow containing the species towards the substrate (8). When in use, the width of the plasma is greater than that of the substrate by an amount defining an outer region of plasma. The guide is adapted to direct the species from at least substantially all of the outer region of the plasma towards the substrate. A corresponding method of plasma treatment is also disclosed.
    Type: Application
    Filed: September 30, 2004
    Publication date: July 12, 2007
    Applicant: OXFORD INSTRUMENTS PLASMA TECHNOLOGY LIMITED
    Inventors: Michael Cooke, Geoffrey Hassall