Abstract: A method of manufacturing a monolithic silicon acceleration sensor is disclosed. The monolithic silicon acceleration sensor includes one or more sensor cells, each sensor cell having an inertial mass positioned by beam members fixed to a silicon support structure. According to the method, a sandwiched etch-stop layer is formed. First sections of the inertia mass and beam members are also formed. In addition, a second section of the inertial mass is formed. Further, an inertial mass positioned by beam members fixed to a silicon support structure is formed. Also, a first cover plate structure is bonded to a first surface of the silicon support structure.

Abstract: A monolithic silicon acceleration sensor capable of detecting acceleration along multiple orthogonal axes of acceleration is disclosed. The monolithic silicon acceleration sensor is micromachined from silicon to form one or more sensor cells, each sensor cell having an inertial mass positioned by beam members fixed to a silicon support structure. Movement of the inertial mass due to acceleration is detected by either a differential capacitance measurement between opposing surfaces of the inertial mass and electrically conductive layers on a top and a bottom cover plate structure, or by a resistance measurement of piezoresistive elements fixed to the positioning beam members. Embodiments of the invention are capable of detecting acceleration in a plane, along two orthogonal axes of acceleration, or along three orthogonal axis of acceleration.

Abstract: A method of manufacturing a monolithic silicon acceleration sensor is disclosed. The monolithic silicon acceleration sensor is micromachined from silicon to form one or more sensor cells, each sensor cell having an inertial mass positioned by beam members fixed to a silicon support structure. A sandwiched etch-stop layer is formed between a first silicon wafer section and a second silicon wafer section. A first section of the inertia mass and beam members are formed by etching a U-shaped channel and a bar-shaped channel in the first wafer section of the sandwiched layer to the etch-stop layer. A second section of the inertial mass is formed by aligning a frame-shaped channel in the second wafer section with the U-shaped channel and the bar-shaped channel in the first section, and etching the frame-shaped channel to the etch-stop layer. After stripping exposed etch-stop layer, an inertial mass positioned by beam members fixed to a silicon support structure is formed.

Abstract: A monolithic silicon acceleration sensor capable of detecting acceleration along multiple orthogonal axes of acceleration is disclosed. The monolithic silicon acceleration sensor is micromachined from silicon to form one or more sensor cells, each sensor cell having an inertial mass positioned by beam members fixed to a silicon support structure. Movement of the inertial mass due to acceleration is detected by either a differential capacitance measurement between opposing surfaces of the inertial mass and electrically conductive layers on a top and a bottom cover plate structure, or by a resistance measurement of piezoresistive elements fixed to the positioning beam members. Embodiments of the invention are capable of detecting acceleration in a plane, along two orthogonal axes of acceleration, or along three orthogonal axis of acceleration.

Abstract: An electronic accelerometer is used to generate an acceleration signal for a passenger restraint system in a motor vehicle. The electrical signal is processed by emulating an electromechanical sensor to detect crashes. The electrical signal may also be differentiated to obtain a jerk signal also used to detect abnormal accelerations.

Abstract: An inflator includes a vessel for a source of gas under pressure. A pulse shaping valving means in the form of a Belleville washer or a sliding valve actuated by a Belleville washer operates to shape the pulse of gas flowing out of the vessel. Other than for a brief initial moment the flowrate of gas has a slower value over time followed by an instantaneous more rapid value followed by a tapering off.

Abstract: A stored gas inflator is operable over a wide range of initial temperatures and such that the dependence of its total output as a function of initial temperature is substantially reduced.A vessel contains gas under pressure and has a seated outlet for the gas which is adapted to open upon command and permit passage of the gas therethrough.A thermal reservoir element is provided.A first exiting flowpath directs gas so that it substantially bypasses or avoids thermal contact with the thermal reservoir element.A second exiting flowpath directs whatever gas does not leave through the first exiting flowpath through the thermal reservoir element so that the gas has substantial thermal contact with the thermal reservoir element.A temperature-dependent flow control means varies the amount of gas passing through each of the aforementioned flowpaths.

Abstract: An air bag assembly is disclosed with an inflator assembly for generating gases with particulate byproducts, and a bag assembly with a gas permeable portion. The gas permeable portion vents gases from the bag at a preselected rate to eliminate injuries from secondary collisions of a passenger with the bag. The permeable portion also filters the gases to protect the passenger from the particulate by products.