Abstract: Provided is a semiconductor device simulation system and method. The simulation system includes; a device structure file input module configured to receive a plurality of device structure files for a plurality of sub-devices obtained by dividing a semiconductor device to be simulated; a connection relationship extraction module configured to extract connection relationships between the device structure files for the sub-devices; an interface condition application module configured to apply interface conditions to interface points of the device structure files according to the extracted connection relationships; and a simulation module configured to simulate an operation of the semiconductor device using the device structure files for the sub-devices and the interface conditions at interface points of adjacent sub-devices. The simulation system can simulate the semiconductor device using a plurality of device structure files for the sub-devices.