Abstract: A wafer includes chip areas and a first scribe lane disposed between the chip areas, and a first trench pattern disposed in the first scribe lane. The first scribe lane extends in a first direction. The first trench pattern includes a plurality of first trench groups spaced apart from each other in the first direction.

Abstract: A spiral phase plate, according to one embodiment, for generating a Laguerre Gaussian beam by reflecting an incident beam emitted from a light source, may comprise: a first quadrant area in which the step height increase rate per unit angle decreases progressively in one direction from the point with the lowest step height to the point with the highest step height; and a second quadrant area in which the step height increase rate per unit angle increases progressively in the one direction.

Abstract: A spiral phase plate, according to one embodiment, for generating a Laguerre Gaussian beam by reflecting an incident beam emitted from a light source, may comprise: a first quadrant area in which the step height increase rate per unit angle decreases progressively in one direction from the point with the lowest step height to the point with the highest step height; and a second quadrant area in which the step height increase rate per unit angle increases progressively in the one direction.

Abstract: Provided is a method of manufacturing a diamond knife for an ultra-microtome, including determining a shape and size of a knife, performing a multiphase flow analysis on movement of a droplet at a fore-end of the knife with the determined shape and size, processing a fine pattern to ensure hydrophobic property according to a result of the flow analysis, and grinding a blade of the knife after the processing of the fine pattern to minimize an interval between the pattern and the blade and, thus, a knife blade is always maintained in a wet state due to a droplet movement between a hydrophobic fine pattern and a hydrophilic surface to continuously generate ultrathin slices.

Abstract: Provided is a fluorescence image acquisition apparatus for acquiring fluorescence images and phase images using optical signals that are modulated at the same frequency and that have different time delays. The fluorescence image acquisition apparatus may include a light source configured to generate, at different time delays, a plurality of optical signals that are modulated at the same frequency, an illuminator configured to control paths of the plurality of modulated optical signals so that the plurality of modulated optical signals are illuminated onto a sample including a plurality of fluorescent materials, a photodetector configured to detect a plurality of fluorescence signals that are emitted from the plurality of fluorescent materials, respectively, and a controller configured to acquire a plurality of fluorescence images and a plurality of phase images from the plurality of detected fluorescence signals.

Abstract: Provided is a solid immersion lens (SIL) holder for optical axis precision correction of a high resolution optical microscope, equipped with a SIL and an objective lens barrel equipped with a plurality of objective lenses, the SIL holder comprising: a circular flange providing in the middle of the objective lens barrel to be coupled to the SIL holder; a coupling flange formed at one end portion thereof and coupled to the circular flange; a conical tube formed at the other end portion thereof, the SIL being mounted onto a lower end portion of the conical tube, wherein the SIL holder comprises an optical axis adjusting part which adjusts such that the central axis of the SIL approaches the central axis of an objective lens, and the SIL holder comprises an extension/contraction adjusting part which allows the SIL to be very close to a measurement surface of a specimen.

Abstract: Provided is a method of manufacturing a diamond knife for an ultra-microtome, including determining a shape and size of a knife, performing a multiphase flow analysis on movement of a droplet at a fore-end of the knife with the determined shape and size, processing a fine pattern to ensure hydrophobic property according to a result of the flow analysis, and grinding a blade of the knife after the processing of the fine pattern to minimize an interval between the pattern and the blade and, thus, a knife blade is always maintained in a wet state due to a droplet movement between a hydrophobic fine pattern and a hydrophilic surface to continuously generate ultrathin slices.

Abstract: Provided is a fluorescence image acquisition apparatus for acquiring fluorescence images and phase images using optical signals that are modulated at the same frequency and that have different time delays. The fluorescence image acquisition apparatus may include a light source configured to generate, at different time delays, a plurality of optical signals that are modulated at the same frequency, an illuminator configured to control paths of the plurality of modulated optical signals so that the plurality of modulated optical signals are illuminated onto a sample including a plurality of fluorescent materials, a photodetector configured to detect a plurality of fluorescence signals that are emitted from the plurality of fluorescent materials, respectively, and a controller configured to acquire a plurality of fluorescence images and a plurality of phase images from the plurality of detected fluorescence signals.

Abstract: Provided is a solid immersion lens (SIL) holder for optical axis precision correction of a high resolution optical microscope, equipped with a SIL and an objective lens barrel equipped with a plurality of objective lenses, the SIL holder comprising: a circular flange providing in the middle of the objective lens barrel to be coupled to the SIL holder; a coupling flange formed at one end portion thereof and coupled to the circular flange; a conical tube formed at the other end portion thereof, the SIL being mounted onto a lower end portion of the conical tube, wherein the SIL holder comprises an optical axis adjusting part which adjusts such that the central axis of the SIL approaches the central axis of an objective lens, and the SIL holder comprises an extension/contraction adjusting part which allows the SIL to be very close to a measurement surface of a specimen.

Abstract: The present invention provides a method for analyzing defects by using heat distribution measurement, comprising: a sample loading unit for loading a sample to check whether or not there is a defect through heat distribution characteristics; a light source for radiating visible light onto the sample; a power supply unit for generating a driving signal in order to periodically heat the sample; a detection unit for detecting reflected light from the surface of the sample; and a signal generator for synchronizing the detection unit with the driving signal of the power supply unit.

Abstract: The present invention pertains to a device for measuring a temperature distribution, which can measure a temperature distribution without contacting a minor sample having a three-dimensional structure. More particularly, the device for measuring the temperature distribution can measure a three-dimensional temperature distribution for a sample, wherein the temperature distribution in a depth direction (direction z) of the sample is measured by a thermo-reflectance technique using a chromatic dispersion lens, a diffraction spectrometer and an optical detection array; and the temperature distribution in parallel directions (direction x-y axes) of the sample is measured by the thermo-reflectance technique using a biaxial scanning mirror.

Abstract: Provided is an apparatus for fixing a solid immersion lens (SIL) in an optical system. The apparatus includes a first adapter; a second adapter screw-coupled to the inner surface of the first adapter and screw-coupled to the outer surface of a third adapter to pressurize a first O-ring; the third adapter screw-coupled to the inner surfaces of the second adapter and a fourth adapter; the fourth adapter screw-coupled to the outer surface of the third adapter to pressurize a second O-ring; the first and second O-rings elastically fixing an outer surface of a barrel of an infrared ray (IR) objective lens; and an SIL holder mounting the SIL onto the first adapter.

Abstract: The present invention relates to a jig for processing the inner surface of an aluminum alloy Winston cone baffle having the thickness of a sheet through an ultra-precision machining, the jig having a shape identically corresponding to the outer shape of a Winston cone baffle having a can body shape made up of compound parabolic, and divided into an upper plate jig and a lower plate jig in formation, wherein the upper plate jig is divided in two, a left side jig and a right side jig, which are formed to correspond in shape and size so as to enable isolation or coupling to/from each other, and the inner surface of the Winston cone baffle attached inside the upper plate jig is made to enable ultra-precision machining at the cutting speed of 220 m/min-300 m/min, which enables the inner surface of the Winston cone baffle to process a slickenside having approximately 4 nm of surface roughness, and in particular, ultra-precision machining at surface roughness of Ra=2.

Abstract: Surface measurement data just provides the coordinates of an object surface without giving various parameters like the radius of curvature, conic constant, and deformation coefficients. In this paper, we propose a novel method for extracting the important parameters for the determination of unknown aspheric surface equations from the measurement of aspheric surfaces. The largest error between the original surface and the reconstructed surface in the theoretical case is shown to be about 8.6 nm. This fact implies that the new method is well suited for the reconstruction of unknown surface equations.

Abstract: Provided is an apparatus for fixing a solid immersion lens (SIL) in an optical system. The apparatus includes a first adapter; a second adapter screw-coupled to the inner surface of the first adapter and screw-coupled to the outer surface of a third adapter to pressurize a first O-ring; the third adapter screw-coupled to the inner surfaces of the second adapter and a fourth adapter; the fourth adapter screw-coupled to the outer surface of the third adapter to pressurize a second O-ring; the first and second O-rings elastically fixing an outer surface of a barrel of an infrared ray (IR) objective lens; and an SIL holder mounting the SIL onto the first adapter.

Abstract: The present invention provides a method for analyzing defects by using heat distribution measurement, comprising: a sample loading unit for loading a sample to check whether or not there is a defect through heat distribution characteristics; a light source for radiating visible light onto the sample; a power supply unit for generating a driving signal in order to periodically heat the sample; a detection unit for detecting reflected light from the surface of the sample; and a signal generator for synchronizing the detection unit with the driving signal of the power supply unit.

Abstract: The present invention relates to an image sensor comprising a microlens array, and to a manufacturing method thereof. The method of the present invention includes gradually increasing the aluminum composition ratio of a compound semiconductor as the latter gradually gets farther from a substrate, to enable a microlens-forming layer to grow, and making the oxidation rate of the region adjacent to the substrate slower and the oxidation rate of the region farther from the substrate faster, making the interface between the oxidized region and the unoxidized region into a lens shape after the completion of oxidation. The thus-made lens is integrated into an image sensor. The present invention reduces costs for manufacturing image sensors in which a microlens is integrated, increases the signal-to-noise ratio and resolution of the image sensor, and achieves improved sensitivity.

Abstract: The present invention relates to a bit for processing the inside diameter of a work material, the bit having on the outer surface of a shank a vibration preventing structure comprising a vibration absorption body made of a silicone material, and a hollow wire rod, thereby absorbing the vibration generated from a machine tool, preventing resonance generated between the work material and a tool, and thus, enabling the implementation of a slickenside from ultra-precision machining.

Abstract: Surface measurement data just provides the coordinates of an object surface without giving various parameters like the radius of curvature, conic constant, and deformation coefficients. In this paper, we propose a novel method for extracting the important parameters for the determination of unknown aspheric surface equations from the measurement of aspheric surfaces. The largest error between the original surface and the reconstructed surface in the theoretical case is shown to be about 8.6 nm. This fact implies that the new method is well suited for the reconstruction of unknown surface equations.