Patents by Inventor Georg Flach

Georg Flach has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5905203
    Abstract: A micromechanical acceleration sensor consists of a first semiconductor wafer and a second semiconductor wafer, where on the first semiconductor wafer first and second electrodes, are provided to create a variable capacitance and the second semiconductor wafer has a movable third electrode, and where on the first semiconductor wafer there is a microelectronic evaluation unit. The moveable electrode is a rocker suspended asymmetrically with regard to an axis of rotation such that each respective portion is of a different length and is opposite one of the first and second electrodes. A closed ring structure is disposed on the surface of the first semiconductor wafer.
    Type: Grant
    Filed: September 30, 1996
    Date of Patent: May 18, 1999
    Assignee: Temic Telefunken microelectronic GmbH
    Inventors: Georg Flach, Udo Nothelfer, Gunther Schuster, Heribert Weber