Abstract: A dielectric protective layer has nanoparticles integrated therein to increase the dielectric constants. The nanoparticles are surrounded by a protective shell to prevent agglomeration, in order to maintain the small particle size, for depositing an extra-thin film.

Abstract: The current invention relates to a method of making metal oxide nanoparticles comprising the reaction of—at least one metal oxide precursor (P) containing at least one metal (M) with—at least one monofunctional alcohol (A) wherein the hydroxy group is bound to a secondary, tertiary or alpha-unsaturated carbon atom—in the presence of at least one aliphatic compound (F) according to the formula Y1—R1—X—R2—Y2, wherein—R1 and R2 each are the same or different and independently selected from aliphatic groups with from 1 to 20 carbon atoms, —Y1 and Y2 each are the same or different and independently selected from OH, NH2 and SH, and —X is selected from the group consisting of chemical bond, —O—, —S—, —NR3—, and CR4R5, wherein R3, R4 and R5 each are the same or different and represent a hydrogen atom or an aliphatic group with from 1 to 20 carbon atoms which optionally carries functional groups selected from OH, NH2 and SH.

Abstract: The invention relates to a dielectric protective layer in which nanoparticles are integrated to increase the dielectric constants. Said nanoparticles are surrounded by a protective shell to prevent agglomeration in order to maintain the small particle size for the depositioning of extra-thin film.