Patents by Inventor Georg Hochgesang

Georg Hochgesang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cleaning agent and method for cleaning semiconductor wafers
    Patent number: 5695572
    Abstract: A cleaning agent and method are useful for cleaning semiconductor wafers. The aqueous cleaning agent has a pH of 1 to 5, preferably a pH of 1 to 3, and contains at least one surfactant and at least one compound which belongs to a group of compounds comprising succinic acid and its derivatives. To clean the semiconductor wafers, a thin film of cleaning agent is generated on the side faces of the semiconductor wafers, preferably using a mechanical tool.
    Type: Grant
    Filed: August 10, 1995
    Date of Patent: December 9, 1997
    Assignee: Wacker Siltronic Gesellschaft fur Halbleitermaterialien Aktiengesellschaft
    Inventors: Roland Brunner, Georg Hochgesang, Anton Schnegg, Gertraud Thalhammer
  • Holding device and method for treating wafer-like objects, and a method of treating them
    Patent number: 5093550
    Abstract: A wafer holding device including a frame (2) which surrounds a wafer (1) ch is received without contact, which can be moved with the wafer having at least three holding elements (3) which are directed toward the outside circumference of the wafer and which can be changed from a holding position to a release position. The wafer can be supported in the holding device during many steps associated with movement in the production process so that a multiplicity of gripping and release operations which stress the wafer surface are unnecessary.
    Type: Grant
    Filed: April 10, 1990
    Date of Patent: March 3, 1992
    Assignee: Wacker-Chemitronic Gesellschaft fur Elektronic-Grundstoffe mbH
    Inventors: Hans A. Gerber, Georg Hochgesang, Alfred Pardubitzki, Manfred Schmiedlindl, Werner Zipf, Arthur Schweighofer