Abstract: The invention relates to a plasma generation device comprising a plurality of plasma modules for generating a plasma. Each plasma module has a module housing with at least one gas inlet for supplying a process gas. Furthermore, a discharge device for generating the plasma from the process gas and a plasma outlet are provided. The plasma generation device has at least two plasma modules for generating a plasma. Each plasma module has at least one gas outlet for some of the process gas, wherein the at least one gas outlet of at least one plasma module issues into a respective gas inlet of another plasma module.

Abstract: The invention relates to a method for producing an actuator unit comprising a piezoactuator (1), a sleeve (9) having a first end face (14) and a second end face (13), and a potting compound (11). The method comprises: inserting the piezoactuator (1) into the sleeve (9), wherein the piezoactuator is inserted into the sleeve (9) from the side of the sleeve (9) having the first end face (14); arranging a filling opening of a filling element (15) in an axial position near the axial position of the second end face (13) of the sleeve (9); filling a hollow space between the inner side of the sleeve (9) and the piezoactuator (1) with the potting compound (11) via the filling opening of the filling element (15), such that the potting compound (11) extends maximally to a first end face (14?) of the piezoactuator (1). The invention further relates to a sleeve (9) for receiving a piezoactuator (1).

Abstract: A piezoelectric multilayer component is specified. At least one external electrode is fixed to a stack of piezoelectric layers and electrode layers arranged therebetween. At least one region of the external electrode projects beyond the stack and the external electrode is at least partly pressure-deformed in said region. Furthermore, a method for forming an external electrode in a piezoelectric multilayer component is specified.

Abstract: A piezoelectric actuator of a multilayer design includes outer electrodes that are fastened by means of a bonding layer applied by thermal spraying. For example, the outer electrodes are formed as a woven wire fabric. Furthermore, a method for fastening an outer electrode in a piezoelectric actuator is specified.

Abstract: A piezoelectric actuator of a multilayer design includes outer electrodes that are fastened by means of a bonding layer applied by thermal spraying. For example, the outer electrodes are formed as a woven wire fabric. Furthermore, a method for fastening an outer electrode in a piezoelectric actuator is specified.

Abstract: A solder material can be used for fastening an outer electrode on a piezoelectric component. The solder material contains tin as the main constituent and at least one addition from the group of cobalt, tungsten, osmium, titanium, vanadium, iron and rare earth metals. A piezoelectric component includes such a solder material. The solder material is applied by means of a base metallization.

Abstract: The invention relates to a method for producing an actuator unit comprising a piezoactuator (1), a sleeve (9) having a first end face (14) and a second end face (13), and a potting compound (11). The method comprises: inserting the piezoactuator (1) into the sleeve (9), wherein the piezoactuator is inserted into the sleeve (9) from the side of the sleeve (9) having the first end face (14); arranging a filling opening of a filling element (15) in an axial position near the axial position of the second end face (13) of the sleeve (9); filling a hollow space between the inner side of the sleeve (9) and the piezoactuator (1) with the potting compound (11) via the filling opening of the filling element (15), such that the potting compound (11) extends maximally to a first end face (14?) of the piezoactuator (1). The invention further relates to a sleeve (9) for receiving a piezoactuator (1).

Abstract: A piezoelectric multilayer component is specified. At least one external electrode is fixed to a stack of piezoelectric layers and electrode layers arranged therebetween. At wherein at least one region of the external electrode projects beyond the stack and the external electrode is at least partly pressure-deformed in said region. Furthermore, a method for forming an external electrode in a piezoelectric multilayer component is specified.

Abstract: A solder material can be used for fastening an outer electrode on a piezoelectric component. The solder material contains tin as the main constituent and at least one addition from the group of cobalt, tungsten, osmium, titanium, vanadium, iron and rare earth metals. A piezoelectric component includes such a solder material. The solder material is applied by means of a base metallization.

Abstract: A piezoactuator of multilayer design includes piezoelectric layers and electrode layers to form a stack. A predetermined breaking layer for the targeted origination and guiding of cracks is introduced between two adjacent electrode layers. The predetermined breaking layer has a barrier region, in which the formation of continuous electrically conductive paths or the formation of cracks leading through the barrier region is impeded.

Abstract: A method for producing a ceramic material is disclosed. A ceramic raw material mixture is produced by comminuting and mixing starting materials containing Pb, Zr, Ti, Nd and oxygen. Nickel or an nickel compound is introduced. The raw material mixture is calcined and a ceramic is sintered.

Abstract: A piezoelectric multilayer component includes a stack of piezoceramic layers, which are arranged one on top of the other, and electrode layers. The stack has a first area and a second area. The second area contains a disturbance material, which is used to make the second area less mechanically robust than the first area.

Abstract: A piezoelectric multilayer component includes a stack of piezoceramic layers, which are arranged one on top of the other, and electrode layers. The stack has a first area and a second area. The second area contains a disturbance material, which is used to make the second area less mechanically robust than the first area.

Abstract: A ceramic multilayer element can be produced by pressing together a plurality of ceramic multilayer segments. Each multilayer segment includes a stack of a plurality of ceramic layers that are pressed together.

Abstract: A method for producing a ceramic material is disclosed. A ceramic raw material mixture is produced by comminuting and mixing starting materials containing Pb, Zr, Ti, Nd and oxygen. Nickel or an nickel compound is introduced. The raw material mixture is calcined and a ceramic is sintered.

Abstract: A piezoelectric multilayer component includes a stack of piezoceramic layers, which are arranged one on top of the other, and electrode layers. The stack has a first area and a second area. The second area contains a disturbance material, which is used to make the second area less mechanically robust than the first area.

Abstract: A piezoelectric actuator of a multilayer design includes outer electrodes that are fastened by means of a bonding layer applied by thermal spraying. For example, the outer electrodes are formed as a woven wire fabric. Furthermore, a method for fastening an outer electrode in a piezoelectric actuator is specified.

Abstract: A ceramic material includes lead zirconate titanate, which additionally contains Nd and Ni. For example, the ceramic material may have a composition according to the following formulae: for y?x/2: a PbO+(Pb1?3x/2+y?x/2?yNdx)((Zr1?zTiz)1?yNiy)O3 for y>x/2: a PbO+(Pb1?xNdx)((Zr1?zTiz)1?yNiy)O3?y+x/2?y?x/2, where 0?a<1, 0<x<1, 0<y<1, 0<z<1, a stands for an excess of PbO in the weigh-in, ? represents a Pb vacancy and ? represents an O vacancy.

Abstract: A piezoactuator of multilayer design includes piezoelectric layers and electrode layers to form a stack. A predetermined breaking layer for the targeted origination and guiding of cracks is introduced between two adjacent electrode layers. The predetermined breaking layer has a barrier region, in which the formation of continuous electrically conductive paths or the formation of cracks leading through the barrier region is impeded.

Abstract: A piezoelectric multilayer component includes a stack of piezoceramic layers, which are arranged one on top of the other, and electrode layers. The stack has a first area and a second area. The second area contains a disturbance material, which is used to make the second area less mechanically robust than the first area.