Patents by Inventor Georg Raming

Georg Raming has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230332323
    Abstract: Single crystal silicon cylindrical portions grown by the CZ method and highly doped with one or more n-type dopants so as to have a resistivity of not more than 2 m?cm are prepared by directing dopant in a gas flow from an external sublimation apparatus into the pulling chamber through or below the heat shield, to the bottom of an annular ring of the heat shield and from there through a plurality of nozzles toward the surface of the melt.
    Type: Application
    Filed: December 3, 2020
    Publication date: October 19, 2023
    Applicant: SILTRONIC AG
    Inventors: Wolfgang STAUDACHER, Georg RAMING
  • Patent number: 11390962
    Abstract: Single crystal silicon with <100> orientation is doped with n-type dopant and comprises a starting cone, a cylindrical portion and an end cone, a crystal angle being not less than 20° and not greater than 30° in a middle portion of the starting cone, the length of which is not less than 50% of a length of the starting cone, and edge facets extending from a periphery of the single crystal into the single crystal, the edge facets in the starting cone and in the cylindrical portion of the single crystal in each case having a length which is not more than 700 ?m.
    Type: Grant
    Filed: August 28, 2018
    Date of Patent: July 19, 2022
    Assignee: SILTRONIC AG
    Inventors: Georg Raming, Ludwig Stockmeier, Jochen Friedrich, Matthias Daniel, Alfred Miller
  • Publication number: 20200270764
    Abstract: Single crystal silicon with <100> orientation is doped with n-type dopant and comprises a starting cone, a cylindrical portion and an end cone, a crystal angle being not less than 20° and not greater than 30° in a middle portion of the starting cone, the length of which is not less than 50% of a length of the starting cone, and edge facets extending from a periphery of the single crystal into the single crystal, the edge facets in the starting cone and in the cylindrical portion of the single crystal in each case having a length which is not more than 700 ?m.
    Type: Application
    Filed: August 28, 2018
    Publication date: August 27, 2020
    Applicant: SILTRONIC AG
    Inventors: Georg RAMING, Ludwig STOCKMEIER, Jochen FRIEDRICH, Matthias DANIEL, Alfred MILLER
  • Patent number: 9932690
    Abstract: A device for producing a single crystal by crystallizing the single crystal in a melt zone, comprising a housing, an inductor for generating heat in the melt zone, a reheater which surrounds and applies thermal radiation to the crystallizing single crystal, and a separating bottom which delimits downward an intermediate space between the reheater and a wall of the housing at a lower end of the reheater.
    Type: Grant
    Filed: July 1, 2013
    Date of Patent: April 3, 2018
    Assignee: SILTRONIC AG
    Inventors: Georg Raming, Ludwig Altmannshofer
  • Patent number: 9932691
    Abstract: A single crystal is grown in a float zone which is inductively heated and the crystallizing single crystal is rotated in a direction of rotation which is periodically reversed at intervals in accordance with an alternating plan, wherein a dwell time during which the single crystal is in a state of rest because of the reversal of the direction of rotation is limited to no more than 60 ms.
    Type: Grant
    Filed: November 19, 2015
    Date of Patent: April 3, 2018
    Assignee: SILTRONIC AG
    Inventors: Georg Raming, Ludwig Altmannshofer, Gundars Ratnieks, Martin Moeller, Frank Muemmler
  • Patent number: 9828693
    Abstract: A crystal of semiconductor material is produced in an apparatus having a crucible with a crucible bottom and a crucible wall, the crucible bottom having a top surface, an underside, and a multitude of openings disposed between the crucible wall and a center of the crucible bottom, and elevations disposed on the top surface and the underside of the crucible bottom; and an induction heating coil disposed below the crucible for melting semiconductor material and stabilizing a melt of semiconductor material covering a growing crystal of semiconductor material. The growth process comprises generating a bed of a semiconductor material feed on the top surface of the crucible bottom and melting semiconductor material on the bed using the induction heating coil.
    Type: Grant
    Filed: May 14, 2015
    Date of Patent: November 28, 2017
    Assignee: SILTRONIC AG
    Inventors: Georg Brenninger, Georg Raming
  • Patent number: 9422634
    Abstract: Single crystals are produced by means of the floating zone method, wherein the single crystal crystallizes below a melt zone at a crystallization boundary, and the emission of crystallization heat is impeded by a reflector surrounding the single crystal, wherein the single crystal is heated in the region of an outer edge of the crystallization boundary by means of a heating device in a first zone, wherein a distance ? between an outer triple point Ta at the outer edge of the crystallization boundary and a center Z of the crystallization boundary is influenced. An apparatus for producing the single crystal provides a heat source below the melting induction coil and above the reflector.
    Type: Grant
    Filed: December 5, 2012
    Date of Patent: August 23, 2016
    Assignee: SILTRONIC AG
    Inventors: Georg Raming, Ludwig Altmannshofer, Gundars Ratnieks, Johann Landrichinger, Josef Lobmeyer, Alfred Holzinger
  • Publication number: 20160177469
    Abstract: A single crystal is grown in a float zone which is inductively heated and the crystallizing single crystal is rotated in a direction of rotation which is periodically reversed at intervals in accordance with an alternating plan, wherein a dwell time during which the single crystal is in a state of rest because of the reversal of the direction of rotation is limited to no more than 60 ms.
    Type: Application
    Filed: November 19, 2015
    Publication date: June 23, 2016
    Inventors: Georg RAMING, Ludwig ALTMANNSHOFER, Gundars RATNIEKS, Martin MOELLER, Frank MUEMMLER
  • Publication number: 20150354087
    Abstract: A crystal of semiconductor material is produced in an apparatus having a crucible with a crucible bottom and a crucible wall, the crucible bottom having a top surface, an underside, and a multitude of openings disposed between the crucible wall and a center of the crucible bottom, and elevations disposed on the top surface and the underside of the crucible bottom; and an induction heating coil disposed below the crucible for melting semiconductor material and stabilizing a melt of semiconductor material covering a growing crystal of semiconductor material. The growth process comprises generating a bed of a semiconductor material feed on the top surface of the crucible bottom and melting semiconductor material on the bed using the induction heating coil.
    Type: Application
    Filed: May 14, 2015
    Publication date: December 10, 2015
    Inventors: Georg BRENNINGER, Georg RAMING
  • Publication number: 20150203987
    Abstract: A device for producing a single crystal by crystallizing the single crystal in a melt zone, comprising a housing, an inductor for generating heat in the melt zone, a reheater which surrounds and applies thermal radiation to the crystallizing single crystal, and a separating bottom which delimits downward an intermediate space between the reheater and a wall of the housing at a lower end of the reheater.
    Type: Application
    Filed: July 1, 2013
    Publication date: July 23, 2015
    Inventors: Georg Raming, Ludwig Altmannshofer
  • Patent number: 8357590
    Abstract: Silicon semiconductor wafers are produced by: pulling a single crystal with a conical section and an adjoining cylindrical section having a diameter ?450 mm and a length of ?800 mm from a melt in a crucible, wherein in pulling the transition from the conical section to the cylindrical section, the pulling rate is at least 1.8 times higher than the average pulling rate during the pulling of the cylindrical section; cooling the growing single crystal with a cooling power of at least 20 kW; feeding heat from the side wall of the crucible to the single crystal, wherein a gap having a height of ?70 mm is present between a heat shield surrounding the single crystal and the melt surface.
    Type: Grant
    Filed: January 13, 2011
    Date of Patent: January 22, 2013
    Assignee: Siltronic AG
    Inventors: Georg Raming, Walter Heuwieser, Andreas Sattler, Alfred Miller
  • Publication number: 20120315428
    Abstract: Silicon semiconductor wafers are produced by: pulling a single crystal with a conical section and an adjoining cylindrical section having a diameter ?450 mm and a length of ?800 mm from a melt in a crucible, wherein in pulling the transition from the conical section to the cylindrical section, the pulling rate is at least 1.8 times higher than the average pulling rate during the pulling of the cylindrical section; cooling the growing single crystal with a cooling power of at least 20 kW; feeding heat from the side wall of the crucible to the single crystal, wherein a gap having a height of ?70 mm is present between a heat shield surrounding the single crystal and the melt surface.
    Type: Application
    Filed: August 22, 2012
    Publication date: December 13, 2012
    Applicant: SILTRONIC AG
    Inventors: Georg Raming, Walter Heuwieser, Andreas Sattler, Alfred Miller
  • Publication number: 20110175202
    Abstract: Silicon semiconductor wafers are produced by: pulling a single crystal with a conical section and an adjoining cylindrical section having a diameter ?450 mm and a length of ?800 mm from a melt in a crucible, wherein in pulling the transition from the conical section to the cylindrical section, the pulling rate is at least 1.8 times higher than the average pulling rate during the pulling of the cylindrical section; cooling the growing single crystal with a cooling power of at least 20 kW; feeding heat from the side wall of the crucible to the single crystal, wherein a gap having a height of ?70 mm is present between a heat shield surrounding the single crystal and the melt surface.
    Type: Application
    Filed: January 13, 2011
    Publication date: July 21, 2011
    Applicant: SILTRONIC AG
    Inventors: Georg Raming, Walter Heuwieser, Andreas Sattler, Alfred Miller