Abstract: An apparatus for depositing film stacks in-situ (i.e., without a vacuum break or air exposure) are described. In one example, a plasma-enhanced chemical vapor deposition apparatus configured to deposit a plurality of film layers on a substrate without exposing the substrate to a vacuum break between film deposition phases, is provided. The apparatus includes a process chamber, a plasma source and a controller configured to control the plasma source to generate reactant radicals using a particular reactant gas mixture during the particular deposition phase, and sustain the plasma during a transition from the particular reactant gas mixture supplied during the particular deposition phase to a different reactant gas mixture supplied during a different deposition phase.

Abstract: Methods for depositing flowable dielectric films using halogen-free precursors and catalysts on a substrate are provided herein. Halogen-free precursors and catalysts include self-catalyzing aminosilane compounds and halogen-free organic acids. Flowable films may be used to fill pores in existing dielectric films on substrates having exposed metallization layers. The methods involve hydrolysis and condensation reactions.

Abstract: The present invention relates to compounds which bind to Beta Trans-ducin repeat-containing protein (PTrCP), and modulate the activity of 13TrCP. In particular, the invention relates to compounds which demonstrate optimised binding to PTrCP. The invention also relates to pharmaceutical compositions comprising such compounds and the use of such compounds as medicaments, specifically for the treatment of disorders associated with aberrant protein degradation, such as cancer. The preferred binding inhibitors are peptides derived from the motive DSGXXS, e.g. DEGFWE, DDGFWD and Succinyl-EGFWE.

Abstract: Hardmask films having high hardness and low stress are provided. In some embodiments a film has a stress of between about ?600 MPa and 600 MPa and hardness of at least about 12 GPa. In some embodiments, a hardmask film is prepared by depositing multiple sub-layers of doped or undoped silicon carbide using multiple densifying plasma post-treatments in a PECVD process chamber. In some embodiments, a hardmask film includes a high-hardness boron-containing film selected from the group consisting of SixByCz, SixByNz, SixByCzNw, BxCy, and BxNy. In some embodiments, a hardmask film includes a germanium-rich GeNx material comprising at least about 60 atomic % of germanium. These hardmasks can be used in a number of back-end and front-end processing schemes in integrated circuit fabrication.

Abstract: A method comprises connecting to a charging server; connecting to an authorization management system; receiving a charging request from a charging server, the charging request identifying an electric charging device requested to be used to charge an electric vehicle; transmitting an authorization request to the authorization management system for the electric charging device to be used to charge the electric vehicle; receiving an authorization response from the authorization management system authorizing the electric charging device to be used to charge the electric vehicle; and transmitting an authorization instruction to the charging server to charge the electric vehicle using the electric charging device.

Abstract: Method and apparatus for reducing metal oxide surfaces to modified metal surfaces are disclosed. By exposing a metal oxide surface to a remote plasma, the metal oxide surface on a substrate can be reduced to pure metal and the metal reflowed. A remote plasma apparatus can treat the metal oxide surface as well as cool, load/unload, and move the substrate within a single standalone apparatus. The remote plasma apparatus includes a processing chamber and a controller configured to provide a substrate having a metal seed layer in a processing chamber, form a remote plasma of a reducing gas species where the remote plasma includes radicals, ions, and/or ultraviolet (UV) radiation from the reducing gas species, and expose a metal seed layer of the substrate to the remote plasma to reduce oxide of the metal seed layer to metal and to reflow the metal.

Abstract: A turbine nozzle is provided including a nozzle airfoil having an airfoil shape, the nozzle airfoil having a nominal profile substantially in accordance with Cartesian coordinate values of X, Y and Z set forth in Table 1 wherein the Cartesian coordinate values of X, Y and Z are non-dimensional values from 0% to 100% convertible to dimensional distances in inches by multiplying the Cartesian coordinate values of X, Y and Z by a height of the airfoil in inches, and wherein X and Y are distances in inches which, when connected by smooth continuing arcs, define airfoil profile sections at each distance Z, the airfoil profile sections at Z distances being joined smoothly with one another to form a complete airfoil shape.

Abstract: A method of forming an oxygen-containing ceramic hard mask film on a semiconductor substrate involves receiving a semiconductor substrate in a plasma-enhanced chemical vapor deposition (PECVD) process chamber and depositing forming by PEVCD on the substrate an oxygen-containing ceramic hard mask film, the film being etch selective to low-k dielectric and copper, resistant to plasma dry-etch and removable by wet-etch. The method may further involve removing the oxygen-containing ceramic hard mask film from the substrate with a wet etch. Corresponding films and apparatus are also provided.

Abstract: Methods for depositing film stacks by plasma enhanced chemical vapor deposition are described. In one example, a method for depositing a film stack on a substrate, wherein the film stack includes films of different compositions and the deposition is performed in a process station in-situ, is provided. The method includes, in a first plasma-activated film deposition phase, depositing a first layer of film having a first film composition on the substrate; in a second plasma-activated deposition phase, depositing a second layer of film having a second film composition on the first layer of film; and sustaining the plasma while transitioning a composition of the plasma from the first plasma-activated film deposition phase to the second plasma-activated film deposition phase.

Abstract: Methods and hardware for depositing ultra-smooth silicon-containing films and film stacks are described. In one example, an embodiment of a method for forming a silicon-containing film on a substrate in a plasma-enhanced chemical vapor deposition apparatus is disclosed, the method including supplying a silicon-containing reactant to the plasma-enhanced chemical vapor deposition apparatus; supplying a co-reactant to the plasma-enhanced chemical vapor deposition apparatus; supplying a capacitively-coupled plasma to a process station of the plasma-enhanced chemical vapor deposition apparatus, the plasma including silicon radicals generated from the silicon-containing reactant and co-reactant radicals generated from the co-reactant; and depositing the silicon-containing film on the substrate, the silicon-containing film having a refractive index of between 1.4 and 2.1, the silicon-containing film further having an absolute roughness of less than or equal to 4.5 ? as measured on a silicon substrate.

Abstract: A network information monitor for accessing and displaying Internet content includes a definition for rendering a graphical user interface and a URL pointing to the Internet Content to be downloaded and presented within said user interface. A graphical viewer may be used in association with the network information monitor to manage the collection, organization, sharing, and rendering of a plurality of such monitors. A user is provided with the option of arranging multiple network information monitors, such as in groups, and such as vertically, horizontally, etc. By selecting, dragging and dropping, network information monitors are snapped or docked together such that they may be move individually or in mass on the client display. The organization and groupings may be shared with others.

Abstract: A wireless electronic device includes a rechargeable battery, a receiver, and a shut down module. The rechargeable battery is at least partially charged. The receiver is configured to enable wireless communications for the wireless device. The receiver is capable of receiving wireless commands configured to cause corresponding functions to be performed in the wireless electronic device, which may include test functions, calibration functions, and shut down functions. The shut down module is configured to cause the wireless electronic device to initiate a shut down protocol according to a shut down command received by the receiver.

Abstract: An Application Media Package for accessing and displaying Internet content includes a definition for rendering a graphical user interface and a URL pointing to the Internet Content to be downloaded and presented within said user interface. An Application Media viewer may be used in association with the Application Media Package to manage the collection, organization, sharing, and rendering of a plurality of such Packages. A user is provided with the option of arranging multiple Application Media Packages, such as in groups, and such as vertically, horizontally, etc. By selecting, dragging and dropping, Packages are snapped or docked together such that they may be move individually or in mass on the client display. The organization and groupings may be shared with others.

Abstract: A method for accessing and displaying network content employs an informational component which includes a definition for rendering a graphical user interface within which content may be presented outside of and without utilization of another application. The informational component also includes one or more definitions of content locations from which content elements may be transmitted over a network and presented within the graphical user interface. A provider of an informational component or informational components may thus create customized displays within which intended content may be rendered. An application component may be used in association with an informational component or informational components to manage the collection, organization, sharing, and rendering of plurality of the informational component(s).

Abstract: A software component for accessing and displaying time-varying Internet content includes a definition for rendering a graphical user interface and a URL pointing to the time-varying Internet content to be downloaded and presented within said user interface. A component provider may create displays of Internet content which vary as a function of the varying of the time-varying Internet content. In one example, the graphical user interface includes an image, and the image varies in order to illustrate the varying of the time-varying data.

Abstract: An informational component for accessing and displaying content includes a definition for rendering a graphical user interface within which content may be served from one or more network locations and presented independent from another application. The informational component may include one or more of a definition of a content element. The definition of the content element may reference a network location from which the content element may be transmitted. The content element may be presented within the graphical user interface. A provider of an informational component or informational components may thus create customized displays within which intended content may be rendered. An application component may be used in association with the informational component to manage the collection, organization, sharing, and rendering of a plurality of such informational components.

Abstract: Hardmask films having high hardness and low stress are provided. In some embodiments a film has a stress of between about ?600 MPa and 600 MPa and hardness of at least about 12 GPa. In some embodiments, a hardmask film is prepared by depositing multiple sub-layers of doped or undoped silicon carbide using multiple densifying plasma post-treatments in a PECVD process chamber. In some embodiments, a hardmask film includes a high-hardness boron-containing film selected from the group consisting of SixByCz, SixByNz, SixByCzNw, BxCy, and BxNy. In some embodiments, a hardmask film includes a germanium-rich GeNx material comprising at least about 60 atomic % of germanium. These hardmasks can be used in a number of back-end and front-end processing schemes in integrated circuit fabrication.

Abstract: A method and system for Bluetooth® and Wireless LAN coexistence may include controlling wireless local area network (WLAN) communication and Bluetooth® communication in a coexistence system that handles at least a WLAN communication protocol and a Bluetooth® communication protocol based on time division multiplexing (TDM) and adaptive frequency hopping (AFH). Switching may occur between the WLAN communication and the Bluetooth® communication based on the TDM and the AFH. In one embodiment of the invention, the switching may occur adaptively. Notwithstanding, in instances where it may be determined that AFH is disabled, switching to TDM may occur. WLAN communication and/or Bluetooth® communication may be disabled or enabled based on a state of at the WLAN communication and/or the Bluetooth® communication. Use of the AFH may be enabled or disabled based on a link status of the WLAN communication and/or the Bluetooth® communication.

Abstract: A wireless electronic device includes a rechargeable battery, a receiver, and a shut down module. The rechargeable battery is at least partially charged. The receiver is configured to enable wireless communications for the wireless device. The receiver is capable of receiving wireless commands configured to cause corresponding functions to be performed in the wireless electronic device, which may include test functions, calibration functions, and shut down functions. The shut down module is configured to cause the wireless electronic device to initiate a shut down protocol according to a shut down command received by the receiver.