Abstract: A system is disclosed which operates to collect high resolution three-dimensional surface mesh data from mechanical components which are used for component evaluation. The system includes a multidimensionally movable fixture mount for holding the mechanical components. A structured light pattern emitting projector is provided together with an image sensing camera for detecting impingement of the light pattern on the mechanical component and for generating the surface data. A set of software tools analyzes the data to provide numerical or quantitative component analysis and further presents the data in display form to allow intuitive or qualitative analysis for product and process improvement.

Abstract: A system mounted with a transportable container for carrying articles such as semiconductor wafers which comprises a non-volatile memory used to store the identity, status and history of the articles in the container. Further, the system includes means for transmitting data from the memory to an information processor associated with a processing station which processes the articles in a carrier. In a preferred embodiment, the system includes data processing capability and both receives data from and transmits data to the processing station.

Abstract: Disclosed is a system mounted with a transportable container for carrying articles such as semiconductor wafers which comprises a non-volatile memory used to store the identity, status and history of the articles in the container. Further, the system includes means for transmitting data from the memory to an information processor associated with a processing station which processes the articles in a carrier. In a preferred embodiment, the system includes data processing capability and both receives data from and transmits data to the processing station.

Abstract: A system for storing transporting and processing articles includes a plurality of transportable containers, each transportable container having an interior region adapted to receive a plurality of articles and data processing device provided on the transportable container for receiving, storing, transmitting and displaying information related to the articles received by the corresponding transportable container. A plurality of workstations are adapted to receive one of the transportable containers and to process selected ones of the articles. The workstation also verifies that at least one of the articles in the transportable container has arrived at the appropriate workstation and communicates with a central processing unit to receive and transmit status information and processing information, and to transmit information stored by the data processing device provided on the transportable container.

Abstract: A transportable container for articles to be processed, for use with a passage elevator for passing the articles between locations, is provided which comprises: a box defining a box opening; a box door for being received by the box opening; a cassette for holding the articles, the cassette supported by the box door and sized for passage through the box opening, the passage elevator passing the cassette through the box opening; a retainer, extending adjacent to the cassette, for substantially retaining the articles held by the cassette, the retainer being movably coupled to the box such that the retainer can move in a direction substantially transverse to a direction of movement of the holder substantially during a passage of the cassette through the box opening.

Abstract: The present invention is an apparatus for maintaining articles, such as semiconductor wafers clean. The wafers or other articles to be processed are placed in a box having first and second regions for making first and second seals. A box door seals the articles into the box. The box has a second region for making the second seal and has a third region for making a third seal. The box is used to transport the wafers to a port in the canopy of the processing equipment. The port is adapted for receiving the box and box door and for transferring the box door and the contents of the box into a region beneath the canopy. The canopy has a first region for making the first seal with the box. Also, the canopy has a fourth region surrounding the port for making a fourth seal. A port door is provided for closing the canopy port when no box is present. The port door has a second region for making the second seal with the box and has a fourth region for making the fourth seal with the canopy.

Abstract: A system is disclosed for eliminating error in teletext signals caused by the presence of noise accompanying the teletext signals. The system includes: (1) a teletext packet buffer which receives the teletext signal and transfers the teletext signals to a teletext decoder in the absence of noise accompanying the teletext signals; (2) a timing circuit which produces timing signals from television synchronous signals; (3) a control circuit which controls the teletext packet buffer in response to the timing signals; and (4) a noise detector which detects whether noise is present in the teletext signal and disables the teletext packet buffer to prevent the transfer of the teletext signal from the teletext packet buffer to the teletext decoder if the teletext signal was received in the presence of noise.