Patents by Inventor George ALAJAJIAN

George ALAJAJIAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Measuring concentrations of radicals in semiconductor processing
    Patent number: 10685819
    Abstract: An apparatus includes a reactive species source, a spectral measurement volume, a light source to emit a light beam into the spectral measurement volume, a spectrometer to receive the light beam from the spectral measurement volume. The apparatus includes an a controller configured to, when a reactive species is present in the spectral measurement volume, control the light source to emit the light beam into the spectral measurement volume and the spectrometer to determine an environment spectrum using the light beam, and when the reactive species is not present in the spectral measurement volume, control the light source to emit the light beam into the spectral measurement volume and the spectrometer to determine a baseline spectrum using the light beam, calculate a net spectrum based on a difference between the environment spectrum and the baseline spectrum, and estimate a concentration of the reactive species based on the net spectrum.
    Type: Grant
    Filed: May 9, 2018
    Date of Patent: June 16, 2020
    Assignee: Applied Materials, Inc.
    Inventors: Ramesh Gopalan, Tom K. Cho, George Alajajian, Michael J. Mark
  • MEASURING CONCENTRATIONS OF RADICALS IN SEMICONDUCTOR PROCESSING
    Publication number: 20180342377
    Abstract: An apparatus includes a reactive species source, a spectral measurement volume, a light source to emit a light beam into the spectral measurement volume, a spectrometer to receive the light beam from the spectral measurement volume. The apparatus includes an a controller configured to, when a reactive species is present in the spectral measurement volume, control the light source to emit the light beam into the spectral measurement volume and the spectrometer to determine an environment spectrum using the light beam, and when the reactive species is not present in the spectral measurement volume, control the light source to emit the light beam into the spectral measurement volume and the spectrometer to determine a baseline spectrum using the light beam, calculate a net spectrum based on a difference between the environment spectrum and the baseline spectrum, and estimate a concentration of the reactive species based on the net spectrum.
    Type: Application
    Filed: May 9, 2018
    Publication date: November 29, 2018
    Inventors: Ramesh GOPALAN, Tom K. CHO, George ALAJAJIAN, Michael J. MARK