Abstract: Hardmask films having high hardness and low stress are provided. In some embodiments a film has a stress of between about ?600 MPa and 600 MPa and hardness of at least about 12 GPa. In some embodiments, a hardmask film is prepared by depositing multiple sub-layers of doped or undoped silicon carbide using multiple densifying plasma post-treatments in a PECVD process chamber. In some embodiments, a hardmask film includes a high-hardness boron-containing film selected from the group consisting of SixByCz, SixByNz, SixByCzNw, BxCy, and BxNy. In some embodiments, a hardmask film includes a germanium-rich GeNx material comprising at least about 60 atomic % of germanium. These hardmasks can be used in a number of back-end and front-end processing schemes in integrated circuit fabrication.

Abstract: A method and system for Bluetooth® and Wireless LAN coexistence may include controlling wireless local area network (WLAN) communication and Bluetooth® communication in a coexistence system that handles at least a WLAN communication protocol and a Bluetooth® communication protocol based on time division multiplexing (TDM) and adaptive frequency hopping (AFH). Switching may occur between the WLAN communication and the Bluetooth® communication based on the TDM and the AFH. In one embodiment of the invention, the switching may occur adaptively. Notwithstanding, in instances where it may be determined that AFH is disabled, switching to TDM may occur. WLAN communication and/or Bluetooth® communication may be disabled or enabled based on a state of at the WLAN communication and/or the Bluetooth® communication. Use of the AFH may be enabled or disabled based on a link status of the WLAN communication and/or the Bluetooth® communication.

Abstract: A wireless electronic device includes a rechargeable battery, a receiver, and a shut down module. The rechargeable battery is at least partially charged. The receiver is configured to enable wireless communications for the wireless device. The receiver is capable of receiving wireless commands configured to cause corresponding functions to be performed in the wireless electronic device, which may include test functions, calibration functions, and shut down functions. The shut down module is configured to cause the wireless electronic device to initiate a shut down protocol according to a shut down command received by the receiver.

Abstract: New methods of filling gaps with dielectric material are provided. The methods involve plasma-enhanced chemical vapor deposition (PECVD) of a flowable polymerized film in a gap, followed by an in-situ treatment to convert the film to a dielectric material. According to various embodiments, the in-situ treatment may be a purely thermal or plasma treatment process. Unlike conventional PECVD processes of solid material, which deposit film in a conformal process, the deposition results in bottom-up fill of the gap. In certain embodiments, a deposition-in situ treatment-deposition-in situ treatment process is performed to form dielectric layers in the gap. The sequence is repeated as necessary for bottom up fill of the gap. Also in certain embodiments, an ex-situ post-treatment process is performed after gap fill is completed. The processes are applicable to frontend and backend gapfill.

Abstract: A method and system for Bluetooth® and Wireless LAN coexistence may include controlling wireless local area network (WLAN) communication and Bluetooth® communication in a coexistence system that handles at least a WLAN communication protocol and a Bluetooth® communication protocol based on time division multiplexing (TDM) and adaptive frequency hopping (AFH). Switching may occur between the WLAN communication and the Bluetooth® communication based on the TDM and the AFH. In one embodiment of the invention, the switching may occur adaptively. Notwithstanding, in instances where it may be determined that AFH is disabled, switching to TDM may occur. WLAN communication and/or Bluetooth® communication may be disabled or enabled based on a state of at the WLAN communication and/or the Bluetooth® communication. Use of the AFH may be enabled or disabled based on a link status of the WLAN communication and/or the Bluetooth® communication.

Abstract: A fieldbus system is provided, having a plurality of fieldbus devices and a controller. The controller is in communication with the plurality of fieldbus devices though a fieldbus. The controller transmits a plurality of high priority Receive Process Data Objects (RPDOs) and a plurality of low priority RPDOs to the plurality of fieldbus devices through the fieldbus. The controller includes a control logic for sending each of the plurality of fieldbus devices one of the plurality of high priority RPDOs during a frame. The frame is the fastest rate at which the high priority RPDOs are transmitted. The controller includes a control logic for sending at least one of the plurality of fieldbus devices at least one of the plurality of low priority RPDOs. The low priority RPDOs are grouped by a minimum wait time.

Abstract: Hardmask films having high hardness and low stress are provided. In some embodiments a film has a stress of between about ?600 MPa and 600 MPa and hardness of at least about 12 GPa. In some embodiments, a hardmask film is prepared by depositing multiple sub-layers of doped or undoped silicon carbide using multiple densifying plasma post-treatments in a PECVD process chamber. In some embodiments, a hardmask film includes a high-hardness boron-containing film selected from the group consisting of SixByCz, SixByNz, SixByCzNw, BxCy, and BxNy. In some embodiments, a hardmask film includes a germanium-rich GeNx material comprising at least about 60 atomic % of germanium. These hardmasks can be used in a number of back-end and front-end processing schemes in integrated circuit fabrication.

Abstract: A method for accessing and displaying Internet content employs a software component which includes a definition for rendering a graphical user interface within which Internet content may be presented outside of and without utilization of a web browser application. The component also includes a network reference, such as a URL, pointing to the Internet content such that the Internet Content may be downloaded and presented within said user interface. A component provider may thus create customized displays within which intended web-content may be rendered. An application component may be used in association with the software component to manage the collection, organization, sharing, and rendering of a plurality of such software components.

Abstract: A software component for accessing and displaying time-varying Internet content includes a definition for rendering a graphical user interface and a URL pointing to the time-varying Internet content to be downloaded and presented within said user interface. A component provider may create displays of Internet content which vary as a function of the varying of the time-varying Internet content. In one example, the graphical user interface includes an image, and the image varies in order to illustrate the varying of the time-varying data.

Abstract: A software component for accessing and displaying Internet content includes a definition for rendering a graphical user interface within which Internet content may be presented outside of and without utilization of a web browser application. The component also includes a network reference, such as a URL, pointing to the Internet content such that the Internet Content may be downloaded and presented within said user interface. A component provider may thus create customized displays within which intended web-content may be rendered. An application component may be used in association with the software component to manage the collection, organization, sharing, and rendering of a plurality of such software components.

Abstract: A method of forming a boron nitride or boron carbon nitride dielectric produces a conformal layer without loading effect. The dielectric layer is formed by chemical vapor deposition (CVD) of a boron-containing film on a substrate, at least a portion of the deposition being conducted without plasma, and then exposing the deposited boron-containing film to a plasma. The CVD component dominates the deposition process, producing a conformal film without loading effect. The dielectric is ashable, and can be removed with a hydrogen plasma without impacting surrounding materials. The dielectric has a much lower wet etch rate compared to other front end spacer or hard mask materials such as silicon oxide or silicon nitride, and has a relatively low dielectric constant, much lower then silicon nitride.

Abstract: Disclosed herein are methods of forming a film stack which may include the plasma accelerated deposition of a silicon nitride film formed from the reaction of nitrogen containing precursor with silicon containing precursor, the plasma accelerated substantial elimination of silicon containing precursor from the processing chamber, the plasma accelerated deposition of a silicon oxide film atop the silicon nitride film formed from the reaction of silicon containing precursor with oxidant, and the plasma accelerated substantial elimination of oxidant from the processing chamber. Also disclosed herein are process station apparatuses for forming a film stack of silicon nitride and silicon oxide films which may include a processing chamber, one or more gas delivery lines, one or more RF generators, and a system controller having machine-readable media with instructions for operating the one or more gas delivery lines, and the one or more RF generators.

Abstract: The embodiments herein relate to plasma-enhanced chemical vapor deposition methods and apparatus for depositing silicon nitride on a substrate. The disclosed methods provide silicon nitride films having wet etch rates (e.g., in dilute hydrofluoric acid or hot phosphoric acid) suitable for certain applications such as vertical memory devices. Further, the methods provide silicon nitride films having defined levels of internal stress suitable for the applications in question. These silicon nitride film characteristics can be set or tuned by controlling, for example, the composition and flow rates of the precursors, as well as the RF power supplied to the plasma and the pressure in the reactor. In certain embodiments, a boron-containing precursor is added.

Abstract: A turbine nozzle is provided including a nozzle airfoil having an airfoil shape, the nozzle airfoil having a nominal profile substantially in accordance with Cartesian coordinate values of X, Y and Z set forth in Table 1 wherein the Cartesian coordinate values of X, Y and Z are non-dimensional values from 0% to 100% convertible to dimensional distances in inches by multiplying the Cartesian coordinate values of X, Y and Z by a height of the airfoil in inches, and wherein X and Y are distances in inches which, when connected by smooth continuing arcs, define airfoil profile sections at each distance Z, the airfoil profile sections at Z distances being joined smoothly with one another to form a complete airfoil shape.

Abstract: A fieldbus system is provided, having a plurality of fieldbus devices and a controller. The controller is in communication with the plurality of fieldbus devices though a fieldbus. The controller transmits a plurality of high priority Receive Process Data Objects (RPDOs) and a plurality of low priority RPDOs to the plurality of fieldbus devices through the fieldbus. The controller includes a control logic for sending each of the plurality of fieldbus devices one of the plurality of high priority RPDOs during a frame. The frame is the fastest rate at which the high priority RPDOs are transmitted. The controller includes a control logic for sending at least one of the plurality of fieldbus devices at least one of the plurality of low priority RPDOs. The low priority RPDOs are grouped by a minimum wait time.

Abstract: A rapid beverage chilling apparatus includes an inner reservoir, an electrical compartment, an impeller, a control wire cord, an outer reservoir, and a plurality of attachments. The inner reservoir includes a concentrically positioned beverage cavity and a plurality of drain holes. The electrical compartment, which includes a battery and a motor, is electrically connected with the wire cord. The electrical compartment also connected with the impeller and connected within the beverage cavity by the plurality of attachments. In order to chill a beverage container, the beverage container has to be positioned within the beverage cavity and placed on top of the impeller. When the rapid beverage chilling apparatus is switched on, the battery powers the motor which rotates the impeller. The impeller transports cold water from the outer reservoir, through the plurality of drain holes, into the beverage cavity to chill the beverage container.

Abstract: A method of forming a boron nitride or boron carbon nitride dielectric produces a conformal layer without loading effect. The dielectric layer is formed by chemical vapor deposition (CVD) of a boron-containing film on a substrate, at least a portion of the deposition being conducted without plasma, and then exposing the deposited boron-containing film to a plasma. The CVD component dominates the deposition process, producing a conformal film without loading effect. The dielectric is ashable, and can be removed with a hydrogen plasma without impacting surrounding materials. The dielectric has a much lower wet etch rate compared to other front end spacer or hard mask materials such as silicon oxide or silicon nitride, and has a relatively low dielectric constant, much lower then silicon nitride.

Abstract: A software component for tracking and tracing the access and display of Internet content employs an Application Media Package. That package includes a definition for rendering a graphical user interface and a URL pointing to Internet content that may be presented within said user interface. An application media viewer manages the collection, organization, sharing, and rendering of a plurality of such software components. Because Application Media Packages are used in groups and often for relatively long periods of time, the present invention may collect real-time multidimensional use statistics that over time becomes a valuable multi-dimensional user behavior profiling database. A server collects use statistics from its Application Media Viewer that runs on client computers or cell phones for example, and manages and tracks Application Media Package and Viewer downloads, access to an Application Media Package library, etc.

Abstract: A paint roller including a roller cover retainer that is releasable to permit a roller cover to be easily removed. The device includes a locking lever pivotable relative to the frame which actuates retainers located within the roller assembly. The locking lever also exerts an axial force adapted to disengage the roller cover from the roller assembly when the retainer is disengaged. A used roller cover can be removed without the need to grasp the used roller cover. Installation of a roller cover onto the roller assembly automatically engages the retainers and shifts the locking lever into the locked position.

Abstract: Hardmask films having high hardness and low stress are provided. In some embodiments a film has a stress of between about ?600 MPa and 600 MPa and hardness of at least about 12 GPa. In some embodiments, a hardmask film is prepared by depositing multiple sub-layers of doped or undoped silicon carbide using multiple densifying plasma post-treatments in a PECVD process chamber. In some embodiments, a hardmask film includes a high-hardness boron-containing film selected from the group consisting of SixByCz, SixByNz, SixByCzNw, BxCy, and BxNy. In some embodiments, a hardmask film includes a germanium-rich GeNx material comprising at least about 60 atomic % of germanium. These hardmasks can be used in a number of back-end and front-end processing schemes in integrated circuit fabrication.