Patents by Inventor George Arie Jan De Fockert
George Arie Jan De Fockert has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230221651Abstract: An imprint lithography apparatus having a first frame to be mounted on a floor, a second frame mounted on the first frame via a kinematic coupling, an alignment sensor mounted on the second frame, to align an imprint lithography template arrangement with a target portion of a substrate, and a position sensor to measure a position of the imprint lithography template arrangement and/or a substrate stage relative to the second frame.Type: ApplicationFiled: March 21, 2023Publication date: July 13, 2023Applicant: ASML NETHERLANDS B.V.Inventors: Catharinus DE SCHIFFART, Michael Jozef Mathijs RENKENS, Gerard VAN SCHOTHORST, Andre Bernardus JEUNINK, Gregor Edward VAN BAARS, Sander Frederik WUISTER, Yvonne Wendela KRUIJT-STEGEMAN, Norbert Erwin Therenzo JANSEN, Toon HARDEMAN, George Arie Jan DE FOCKERT, Johan Frederik DIJKSMAN
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Patent number: 11635696Abstract: An imprint lithography apparatus having a first frame to be mounted on a floor, a second frame mounted on the first frame via a kinematic coupling, an alignment sensor mounted on the second frame, to align an imprint lithography template arrangement with a target portion of a substrate, and a position sensor to measure a position of the imprint lithography template arrangement and/or a substrate stage relative to the second frame.Type: GrantFiled: December 14, 2020Date of Patent: April 25, 2023Assignee: ASML NETHERLANDS B.V.Inventors: Catharinus De Schiffart, Michael Jozef Mathijs Renkens, Gerard Van Schothorst, Andre Bernardus Jeunink, Gregor Edward Van Baars, Sander Frederik Wuister, Yvonne Wendela Kruijt-Stegeman, Norbert Erwin Therenzo Jansen, Toon Hardeman, George Arie Jan De Fockert, Johan Frederik Dijksman
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Publication number: 20210096468Abstract: An imprint lithography apparatus having a first frame to be mounted on a floor, a second frame mounted on the first frame via a kinematic coupling, an alignment sensor mounted on the second frame, to align an imprint lithography template arrangement with a target portion of a substrate, and a position sensor to measure a position of the imprint lithography template arrangement and/or a substrate stage relative to the second frame.Type: ApplicationFiled: December 14, 2020Publication date: April 1, 2021Applicant: ASML NETHERLANDS B.V.Inventors: Catharinus DE SCHIFFART, Michael Jozef Mathijs RENKENS, Gerard VAN SCHOTHORST, Andre Bernardus JEUNINK, Gregor Edward VAN BAARS, Sander Frederik WUISTER, Yvonne Wendela KRUIJT-STEGEMAN, Norbert Erwin Therenzo JANSEN, Toon HARDEMAN, George Arie Jan DE FOCKERT, Johan Frederik DIJKSMAN
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Patent number: 10908510Abstract: An imprint lithography apparatus having a first frame to be mounted on a floor, a second frame mounted on the first frame via a kinematic coupling, an alignment sensor mounted on the second frame, to align an imprint lithography template arrangement with a target portion of a substrate, and a position sensor to measure a position of the imprint lithography template arrangement and/or a substrate stage relative to the second frame.Type: GrantFiled: August 26, 2019Date of Patent: February 2, 2021Assignee: ASML Netherlands B.V.Inventors: Catharinus De Schiffart, Michael Jozef Mathijs Renkens, Gerard Van Schothorst, Andre Bernardus Jeunink, Gregor Edward Van Baars, Sander Frederik Wuister, Yvonne Wendela Kruijt-Stegeman, Norbert Erwin Therenzo Jansen, Toon Hardeman, George Arie Jan De Fockert, Johan Frederik Dijksman
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Patent number: 10890851Abstract: An imprint lithography apparatus having a first frame to be mounted on a floor, a second frame mounted on the first frame via a kinematic coupling, an alignment sensor mounted on the second frame, to align an imprint lithography template arrangement with a target portion of a substrate, and a position sensor to measure a position of the imprint lithography template arrangement and/or a substrate stage relative to the second frame.Type: GrantFiled: December 1, 2017Date of Patent: January 12, 2021Assignee: ASML Netherlands B.V.Inventors: Catharinus De Schiffart, Michael Jozef Mathijs Renkens, Gerard Van Schothorst, Andre Bernardus Jeunink, Gregor Edward Van Baars, Sander Frederik Wuister, Yvonne Wendela Kruijt-Stegeman, Norbert Erwin Therenzo Jansen, Toon Hardeman, George Arie Jan De Fockert, Johan Frederik Dijksman
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Publication number: 20190377265Abstract: An imprint lithography apparatus having a first frame to be mounted on a floor, a second frame mounted on the first frame via a kinematic coupling, an alignment sensor mounted on the second frame, to align an imprint lithography template arrangement with a target portion of a substrate, and a position sensor to measure a position of the imprint lithography template arrangement and/or a substrate stage relative to the second frame.Type: ApplicationFiled: August 26, 2019Publication date: December 12, 2019Applicant: ASML NETHERLANDS B.V.Inventors: Catharinus DE SCHIFFART, Michael Jozef Mathijs RENKENS, Gerard VAN SCHOTHORST, Andre Bernardus JEUNINK, Gregor Edward VAN BAARS, Sander Frederik WUISTER, Yvonne Wendela KRUIJT-STEGEMAN, Norbert Erwin Therenzo JANSEN, Toon HARDEMAN, George Arie Jan DE FOCKERT, Johan Frederik DIJKSMAN
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Patent number: 10073358Abstract: A magnetization tool for post-assembly magnetization of a magnet assembly including a main coil, an end surface of the main coil configured to be positioned substantially parallel to an outer surface of the magnet assembly for magnetizing a magnetic pole of the magnet assembly, the main coil being configured to generate a magnetic field and a shielding arrangement positioned adjacent the main coil in a plane substantially parallel to the end surface of the main coil, whereby the shielding arrangement is configured to generate a shielding magnetic field, whereby a resulting magnetic field of the shielding magnetic field and the magnetic field is substantially only protruding the magnetic pole of the magnet assembly and directly adjacent magnetic poles of the magnet assembly such that the magnetic pole of the magnet assembly and the directly adjacent magnetic poles of the magnetic pole have a substantially opposite polarity.Type: GrantFiled: May 20, 2014Date of Patent: September 11, 2018Assignee: ASML NETHERLANDS B.V.Inventors: Petrus Carolus Maria Frissen, Gerardus Lucien Mathildus Jansen, George Arie Jan De Fockert
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Publication number: 20180088468Abstract: An imprint lithography apparatus having a first frame to be mounted on a floor, a second frame mounted on the first frame via a kinematic coupling, an alignment sensor mounted on the second frame, to align an imprint lithography template arrangement with a target portion of a substrate, and a position sensor to measure a position of the imprint lithography template arrangement and/or a substrate stage relative to the second frame.Type: ApplicationFiled: December 1, 2017Publication date: March 29, 2018Applicant: ASML NETHERLANDS B.V.Inventors: Catharinus DE SCHIFFART, Michael Jozef Mathijs RENKENS, Gerard VAN SCHOTHORST, Andre Bernardus JEUNINK, Gregor Edward VAN BAARS, Sander Frederik WUISTER, Yvonne Wendela KRUIJT-STEGEMAN, Norbert Erwin Therenzo JANSEN, Toon HARDEMAN, George Arie Jan DE FOCKERT, Johan Frederik DIJKSMAN
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Patent number: 9864279Abstract: An imprint lithography apparatus having a first frame to be mounted on a floor, a second frame mounted on the first frame via a kinematic coupling, an alignment sensor mounted on the second frame, to align an imprint lithography template arrangement with a target portion of a substrate, and a position sensor to measure a position of the imprint lithography template arrangement and/or a substrate stage relative to the second frame.Type: GrantFiled: June 14, 2011Date of Patent: January 9, 2018Assignee: ASML NETHERLANDS B.V.Inventors: Catharinus De Schiffart, Michael Jozef Mathijs Renkens, Gerard Van Schothorst, Andre Bernardus Jeunink, Gregor Edward Van Baars, Sander Frederik Wuister, Yvonne Wendela Kruijt-Stegeman, Norbert Erwin Therenzo Jansen, Toon Hardeman, George Arie Jan De Fockert, Johan Frederik Dijksman
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Publication number: 20160070181Abstract: A magnetization tool for post-assembly magnetization of a magnet assembly including a main coil, an end surface of the main coil configured to be positioned substantially parallel to an outer surface of the magnet assembly for magnetizing a magnetic pole of the magnet assembly, the main coil being configured to generate a magnetic field and a shielding arrangement positioned adjacent the main coil in a plane substantially parallel to the end surface of the main coil, whereby the shielding arrangement is configured to generate a shielding magnetic field, whereby a resulting magnetic field of the shielding magnetic field and the magnetic field is substantially only protruding the magnetic pole of the magnet assembly and directly adjacent magnetic poles of the magnet assembly such that the magnetic pole of the magnet assembly and the directly adjacent magnetic poles of the magnetic pole have a substantially opposite polarity.Type: ApplicationFiled: May 20, 2014Publication date: March 10, 2016Applicant: ASML Netherlands B.V.Inventors: Petrus Carolus Maria FRISSEN, Gerardus Lucien Mathildus JANSEN, George Arie Jan DE FOCKERT
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Publication number: 20130182236Abstract: An imprint lithography apparatus having a first frame to be mounted on a floor, a second frame mounted on the first frame via a kinematic coupling, an alignment sensor mounted on the second frame, to align an imprint lithography template arrangement with a target portion of a substrate, and a position sensor to measure a position of the imprint lithography template arrangement and/or a substrate stage relative to the second frame.Type: ApplicationFiled: June 14, 2011Publication date: July 18, 2013Applicant: ASML Netherlands B.V.Inventors: Catharinus De Schiffart, Michael Jozef Mathijs Renkens, Gerard Van Schothorst, Andre Bernardus Jeunink, Gregor Edward Van Baars, Sander Frederik Wuister, Yvonne Wendela Kruijt-Stegeman, Norbert Erwin Therenzo Jansen, Toon Hardeman, George Arie Jan De Fockert, Johan Frederik Dijksman
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Publication number: 20100076586Abstract: A positioning device (11) comprises a stationary frame (2), and at least two scales (20, 30) for measuring the location of the platform with respect to the frame, the scales having mutually different pitches (P1; P2), and respective scanners (23, 33) providing respective scanner output signals (SM 1, SM2)—A controller (6) receiving both scanner output signals is capable to uniquely calculate the position (X) of the platform with respect to the frame in a measuring range (MR) that is larger than the largest of said two pitches (P1; P2).Type: ApplicationFiled: October 25, 2007Publication date: March 25, 2010Applicant: KONINKLIJKE PHILIPS ELECTRONICS N.V.Inventors: Georgo Zorz Angelis, Peter Hoekstra, George Arie Jan De Fockert
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Patent number: 6847134Abstract: Positioning device having a first part (1) which is movable relative to a second part (2) in a X and Y-direction, said first part (1) comprising a carrier (5) on which a system of magnets (3) is arranged in a pattern of rows (7) and columns (8) parallel to the X- and Y-direction, respectively. The magnets in each row and column are arranged in a Halbach array, i.e. the magnetic orientation of each successive magnet in each row (7) and each column (8) is rotated through 90° counter-clockwise. The second part (2) comprises an electric coil system (4) with two types of electric coils (C1, C2), one type having an angular offset of +45° and the other type having an offset of ?45° with respect to the X-direction. The magnet configuration causes a very strong magnetic field.Type: GrantFiled: July 9, 2003Date of Patent: January 25, 2005Assignee: Koninklijke Philips Electronics N.V.Inventors: Petrus Carolus Maria Frissen, Johan Cornelia Compter, Michael Josepha Mathijs Renkens, George Arie Jan De Fockert, Rob Jacobus Matheus Coolen
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Publication number: 20040017116Abstract: Positioning device having a first part (1) which is movable relative to a second part (2) in a X and Y-direction, said first part (1) comprising a carrier (5) on which a system of magnets (3) is arranged in a pattern of rows (7) and columns (8) parallel to the X- and Y-direction, respectively. The magnets in each row and column are arranged in a Halbach array, i.e. the magnetic orientation of each successive magnet in each row (7) and each column (8) is rotated through 90° counter-clockwise. The second part (2) comprises an electric coil system (4) with two types of electric coils (C1, C2), one type having an angular offset of +45° and the other type having an offset of −45° with respect to the X-direction. The magnet configuration causes a very strong magnetic field.Type: ApplicationFiled: July 9, 2003Publication date: January 29, 2004Applicant: KONINKLIJKE PHILIPS ELECTRONICS N.V.Inventors: Petrus Carolus Maria Frissen, Johan Cornelia Compter, Michael Josepha Mathijs Renkens, George Arie Jan De Fockert, Rob Jacobue Matheus Coolen
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Patent number: 6661127Abstract: Positioning device having a first part (1) which is movable relative to a second part (2) in a X and Y-direction, said first part (1) having a carrier (5) on which a system of magnets (3) is arranged in a pattern of rows (7) and columns (8) parallel to the X- and Y-direction, respectively. The magnets in each row and column are arranged in a Halbach array, i.e. the magnetic orientation of each successive magnet in each row (7) and each column (8) is rotated through 90° counter-clockwise. The second part (2) has an electric coil system (4) with two types of electric coils (C1, C2), one type having an angular offset of +45° and the other type having an offset of −45° with respect to the X-direction. The magnet configuration causes a very strong magnetic field.Type: GrantFiled: December 21, 2001Date of Patent: December 9, 2003Assignee: Koninklijke Philips Electronics N.V.Inventors: Petrus Carolus Maria Frissen, Johan Cornelis Compter, Michael Josepha Mathijs Renkens, George Arie Jan De Fockert, Rob Jacobus Matheus Coolen
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Publication number: 20020079888Abstract: Positioning device having a first part (1) which is movable relative to a second part (2) in a X and Y-direction, said first part (1) comprising a carrier (5) on which a system of magnets (3) is arranged in a pattern of rows (7) and columns (8) parallel to the X- and Y-direction, respectively. The magnets in each row and column are arranged in a Halbach array, i.e. the magnetic orientation of each successive magnet in each row (7) and each column (8) is rotated through 90° counter-clockwise. The second part (2) comprises an electric coil system (4) with two types of electric coils (C1, C2), one type having an angular offset of +45° and the other type having an offset of −45° with respect to the X-direction. The magnet configuration causes a very strong magnetic field.Type: ApplicationFiled: December 21, 2001Publication date: June 27, 2002Applicant: KONINKLIJKE PHILIPS ELECTRONICS N.V.Inventors: Petrus Carolus Maria Frissen, Johan Cornelis Compter, Michael Josepha Mathijs Renkens, George Arie Jan De Fockert, Rob Jacobus Matheus Coolen