Patents by Inventor George Chiaverini

George Chiaverini has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method to control properties of fluid discharge via refrigerative exhaust
    Patent number: 10443943
    Abstract: An apparatus and method for controlling fluid discharge temperature on a semiconductor manufacturing tool. In this technique, the temperature is controlled via the use of refrigerative exhaust. This embodiment includes the hardware and controls to perform and monitor the described operation.
    Type: Grant
    Filed: March 29, 2017
    Date of Patent: October 15, 2019
    Assignee: VEECO PRECISION SURFACE PROCESSING LLC
    Inventors: John Taddei, Laura Mauer, George Chiaverini, Jia Li
  • Apparatus and Method to Control Properties of Fluid Discharge Via Refrigerative Exhaust
    Publication number: 20170284752
    Abstract: An apparatus and method for controlling fluid discharge temperature on a semiconductor manufacturing tool. In this technique, the temperature is controlled via the use of refrigerative exhaust. This embodiment includes the hardware and controls to perform and monitor the described operation.
    Type: Application
    Filed: March 29, 2017
    Publication date: October 5, 2017
    Inventors: John Taddei, Laura Mauer, George Chiaverini, Jia Li