Patents by Inventor George F. Ouimet, Jr.

George F. Ouimet, Jr. has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for ozone generation and surface treatment
    Patent number: 6178973
    Abstract: A method and apparatus for treating the surface of a substrate includes generating ozone in a generation chamber by using an optical source and transporting the ozone to a treatment chamber containing the substrate. The surface treatment utilizes an optical energy source and the generated ozone. The generation chamber and the treatment chamber are initially isolated from one another, which allows for the selective regulation of delivering ozone from the generation chamber to the treatment chamber. Preferably, a single optical source both generates ozone in the generation chamber and serves to clean and/or planarize the surface in the treatment chamber.
    Type: Grant
    Filed: July 28, 1998
    Date of Patent: January 30, 2001
    Assignee: International Business Machines Corporation
    Inventors: Daniel L. Franca, George F. Ouimet, Jr., Uldis A. Ziemins
  • Etching composition and use thereof
    Patent number: 5780363
    Abstract: An aqueous etchant composition containing about 0.01 to about 15 percent by weight of sulfuric acid and about 0.01 to about 20 percent by weight of hydrogen peroxide or about 1 to 30 ppm of ozone is effective in removing polymer residue from a substrate, and especially from an integrated circuit chip having aluminum lines thereon.
    Type: Grant
    Filed: April 4, 1997
    Date of Patent: July 14, 1998
    Assignee: International Business Machines Coporation
    Inventors: Donald John Delehanty, Rangarajan Jagannathan, Kenneth John McCullough, Donna Diane Miura, George F. Ouimet, Jr., David Lee Rath, Bryan Newton Rhoads, Frank John Schmidt, Jr.