Abstract: The dispatching apparatus with a gas supply distribution system (300) basically comprises an automatic handler 301 and a vertical stocker (302). The vertical stocker has a frame (308) formed by an assembly of tubes supporting a plurality of support stations or bins (309) each provided with gas infectors (311) connected on the one hand to the gas injection valves of the container and on the other hand to a compressed ultra pure neutral gas supply installation. As a result, during the processing idle times, an adequate overpressure of said neutral gas is maintained in the interior space of the container enclosing the workpiece, e.g. a silicon wafer. The automatic handler (301) basically comprises a handling robot (305) having an extending arm (306) provided with gripping means (307) adapted to the container design. The handling robot (305) is affixed on an elevator (304) for vertical movement and is able to rotate about it.

Abstract: A pressurized sealable transportable container (100) stores at least one workpiece (138) and has a substantially parallelepipedic-shaped cassette reservoir (123). The container has a box-shaped housing (102) with a main access opening (104) on the front lateral face and protective shells to protect the housing top (143) and bottom (144) surfaces. A door (124) mates with the main access opening to define a sealable interior space (103). The housing has a gas injection valve (124) adapted for connection to a compressed ultra pure neutral gas supply installation (700) to establish a determined static first or nominal pressure p within the interior space having a positive differential pressure .DELTA.p with respect to the outside ambient. A support (108) firmly and accurately maintains the workpiece within the interior space.

Abstract: A fully automated and computerized conveyor based manufacturing line architecture (15) is provided for the storage, handling and transportation of articles by processing equipment (500). The articles are stored in a pressurized sealable transportable container (100) which are transported by the conveyor (401-1). A gas supply (700-1) and delivery system (702-1) cooperate with a dispatching apparatus with a gas distribution system (300-1) to feed compressed ultra pure neutral gas to the containers. A pressurized interface apparatus (201-1) is adapted to receive the containers and transfer the articles enclosed therein to the processing equipment. The convenyor, dispatching apparatus, gas supply, interface and processing equipment are all computer controlled.

Abstract: A pressurized interface apparatus (200) is provided for transferring a workpiece from within a pressurized sealable transportable container (100) into a specified environment and vice versa. The container consists of a box-shaped housing (102) having an access opening (104) sealed by a releasable door (124) and having a gas injection valve (129). The interface apparatus includes an IN/OUT section having a box-shaped frame (201) with a port zone defining an interior space (204) provided with a first opening (205A) and a second opening (205'A) opposite thereto and communicating with the specified environment. The apparatus further includes a lid controlled by a drive (209A) to seal the first opening and cause the port zone to operate as a load lock chamber. A transfer handler (216A) having a workpiece gripper (218A) is mounted within the port zone. A container receiver is positioned in front of the first opening for receiving a container in a waiting position or in a working position adjacent the first opening.