Abstract: A method and apparatus for repairing and improving the endurance characteristics of process damaged oxide film formed in a semiconductor device involving sonic annealing by vibrating or oscillating a wafer at a predetermined frequency, wave amplitude, and duration. A signal from a frequency generator is amplified by a voltage amplifier and then sent to a speaker or other acoustic device for the production of vibrating acoustical wave energy. This acoustical wave energy is then directed at a submicron device wafer during a specified time period in order to anneal the gate oxide and, thereby, improve the characteristics of the oxide film.

Abstract: A floating gate type nonvolatile memory cell of the general class known as electrically erasable programmable read only memories, configured with a single polysilicon layer, operable in a direct write mode, and characterized by its absence of read disturb. In one form of its practice, the floating gate is divided into three regions situated with relation to specified regions in the substrate. The first region of the floating gate is dielectrically isolated from a conductively doped region in the substrate so as to form a capacitor; the second region is similarly situated, but forms a significantly smaller capacitor and utilizes a dielectric suitable for Fowler-Nordheim tunneling or Poole-Frenkel conduction of charge therethrough; and the third region overlaps a channel of a field effect type sense transistor, conduction through which is responsive to the charge resident on the floating gate.