Abstract: In semiconductor wafer manufacturing, processes such as analyzing test data associated with semiconductor wafers, interpreting the test data analysis, and acting on the test data interpretation and analysis are automated. Such automation can eliminate delays that were previously imposed by the action of test analysis engineers and wafer fabrication personnel, thereby reducing the amount of useless material that is produced before a process defect can be detected.

Abstract: A manufacturing exception handling system is described for use with a manufacturing execution system that controls a semiconductor manufacturing process. The present invention provides real time information to the user that identifies restrictions that have been placed on the use of entities and inventories in the semiconductor manufacturing process. The present invention also provides real time information to the user that identifies the persons who are authorized to remove the restrictions. The present invention saves the time and effort that would otherwise be required to find out why a restriction existed and who could remove the restriction during the semiconductor manufacturing process.

Abstract: A system and method is disclosed for providing automatic qualification intervention in a manufacturing process that is performed by a plurality of components. At least one qualification process is associated with each of the components. The qualification processes are stored in a component/qualification matrix in a computerized database management system. The automatic qualification intervention system requires that all qualification processes for a component must be performed in conformity with the qualification processes for the component that have been stored in the component/qualification matrix. The automatic qualification intervention system significantly reduces the delays that are inherent in prior art methods.

Abstract: A delivery system for dispensing material onto a semiconductor wafer is provided that includes an opening device and a dispensing device. The opening device is operable to open a packet of material. The dispensing device is operable to dispense the material from the packet onto the semiconductor wafer.

Abstract: There are disclosed systems, as well as methods of operation, for allocating multi-function resources among a plurality of tasks within a process system. An exemplary resource allocator is introduced that allocates multi-function resources among tasks within a process system capable of executing at least one application process. The resource allocator comprises a monitoring controller, model of the process system and a resource allocation controller. The monitoring controller monitors measurable characteristics associated with the executing application process, multi-function resources and tasks, each of the measurable characteristics being one of a status characteristic and a logistical characteristic. The model represents mathematically the multi-function resources and the tasks, and defines relationships among related ones thereof as a function of the application process.

Abstract: A system and method is disclosed for allocating multi-function resources among a plurality of tasks within a process system in semiconductor wafer fabrication. A resource allocator allocates multi-function resources among tasks within a process system that executes at least one application process. The resource allocator comprises a monitoring controller, model of the process system, a resource allocation controller, and a compliance-monitoring viewer. The compliance-monitoring viewer is operable to display process system information to illustrate plan compliance, information visualized over a time period of years, months, days, hours, seconds, microseconds or the like.

Abstract: A system and method is disclosed for allocating multi-function resources among a plurality of tasks within a wetdeck process in semiconductor wafer fabrication. A resource allocator allocates multi-function resources among tasks within a process system that executes at least one application process. The resource allocator comprises a monitoring controller, model of the process system and a resource allocation controller. The monitoring controller monitors measurable characteristics associated with the executing application process, multi-function resources and tasks. The model represents the multi-function resources and the tasks, and defines relationships among them. The resource allocation controller operates the model in response to the monitored measurable characteristics and allocates ones of the multi-function resources among ones of the tasks to efficiently execute the wetdeck process of the semiconductor wafer fabrication process.

Abstract: This invention introduces systems and methods that control production process quality, wherein the production process has a plurality of durable items, each durable item is associated with a re-qualification process initiated as a function of a life expectancy associated therewith. The life expectancy associated with each durable item is reset upon completion of the associated re-qualification process. An exemplary method comprises (I) monitoring re-qualification indicia associated with each associated re-qualification process, and (ii) controlling availability of re-qualified durable items of the production process as a function of the re-qualification indicia to thereby control production process quality.

Abstract: A resource allocator allocates a plurality of resources among a plurality of tasks within a process system. The resource allocator includes a monitoring controller for monitoring one or more characteristics associated with at least one application process, the resources, and the tasks. The resource allocator also includes a model of the process system representing mathematically the resources and the tasks and defining relationships among related resources and tasks. The resource allocator further includes a resource allocation controller for operating the model in response to the monitored characteristics and allocating the resources among the tasks. In addition, the resource allocator includes a graphical user interface for identifying the resources and flows between at least some of the resources. The graphical user interface includes at least one virtual queue associated with at least one of the resources and identifying one or more items to be processed by the at least one resource.

Abstract: A system and method is disclosed for allocating multi-function resources among a plurality of tasks within a wetdeck process in semiconductor wafer fabrication. A resource allocator allocates multi-function resources among tasks within a process system that executes at least one application process. The resource allocator comprises a monitoring controller, model of the process system and a resource allocation controller. The monitoring controller monitors measurable characteristics associated with the executing application process, multi-function resources and tasks. The model represents the multi-function resources and the tasks, and defines relationships among them. The resource allocation controller operates the model in response to the monitored measurable characteristics and allocates ones of the multi-function resources among ones of the tasks to efficiently execute the wetdeck process of the semiconductor wafer fabrication process.

Abstract: A system and method is disclosed for allocating multi-function resources among a plurality of tasks within a process system in semiconductor wafer fabrication. A resource allocator allocates multi-function resources among tasks within a process system that executes at least one application process. The resource allocator comprises a monitoring controller, model of the process system, a resource allocation controller, and a graphical user interface. The graphical user interface transforms process system information of the resource allocator into an audio-visual format to enable supervisory interaction. In one embodiment the graphical user interface provides information to reduce load conflict among multiple furnaces in semiconductor wafer fabrication.

Abstract: There are disclosed systems, as well as methods of operation, for allocating multi-function resources among a plurality of tasks within a process system. An exemplary resource allocator is introduced that allocates multi-function resources among tasks within a process system capable of executing at least one application process. The resource allocator comprises a monitoring controller, model of the process system and a resource allocation controller. The monitoring controller monitors measurable characteristics associated with the executing application process, multi-function resources and tasks, each of the measurable characteristics being one of a status characteristic and a logistical characteristic. The model represents mathematically the multi-function resources and the tasks, and defines relationships among related ones thereof as a function of the application process.

Abstract: A system and method is disclosed for allocating multi-function resources among a plurality of tasks within a process system in semiconductor wafer fabrication. A resource allocator allocates multi-function resources among tasks within a process system that executes at least one application process. The resource allocator comprises a monitoring controller, model of the process system, a resource allocation controller, and a compliance-monitoring viewer. The compliance-monitoring viewer is operable to display process system information to illustrate plan compliance, information visualized over a time period of years, months, days, hours, seconds, microseconds or the like.